Model

Thermal sensor

Valve type

N₂, (Air, H₂, He, Ar, O₂, CO₂) *2

Flow range *3

2-100% (F.S.)

Response *4

Total flow rate control range ±1 sec (within ±2% F.S.)
L:50kPa-149kPa H:150kPa-300kPa

Accuracy *5

±1.0% S.P. (> 35% F.S.)
±0.35% F.S. (≤ 35% F.S.)

Repeatability

50-300 kPa (100-300 kPa for Ar and CO₂)

Inlet maximum pressure

980kPa（G）

External leak rate

Working temp.

5〜50℃

15〜35℃

Allowable
storage temp.

-10〜60℃

Permissible ambient humidity
Allowable operating humidity

10-90% RH (without dew condensation)

Materials of gas contact part

SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM

Electrical connection

0-5 V DC (input impedance: approx. 1 MΩ), or 4 to 20 mA (input impedance: approx. 250 Ω)

Flow rate output signal

0-5 V DC (load resistance 10 kΩ), or 4 to 20 mA
(load resistance ≤ 500 Ω)

Digital communication

Address setting with RS485 rotary switch or indicator:
up to 99 devices (9600 bps)

Event input

Three NPN open collectors
(non-insulated, max. rating 35 V, 50 mA)

Required power supply (DC)

+24 V DC (±10%), 300 mA max. (DC jack, D-sub)

Joint *8

Mounting posture

Horizontal installation recommended

Approx. 950 g

Model

Thermal sensor

Valve type

Air, N2

Flow range*2

200, 300 SLM

Control range

5 to 100% (F.S.)

Response*3

≤2 sec (within ±2% F.S.)

Accuracy*4

±0.5%F.S.

Operating differential
pressure*5

200 SLM : 200 to 350 kPa
300 SLM : 250 to 350 kPa

Inlet maximum pressure

980kPa（G）

External leak rate

≤­1.0 x 10^-7 Pa·m³/sec (He)

Temperature

5〜50℃

Accuracy
guaranteed temp.

15〜35℃

Allowable
storage temp.

-10〜60℃

Allowable operating humidity

10 to 90% RH (without dew condensation)

Materials of gas contact part

SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM

Electrical connection

D-sub 9-pin, HR-10A (two)

Flow rate setting signal

0 to 5 V DC (load resistance 10 kΩ)

Digital communication

+15 V DC (±5%) : 150 mA
-15 V DC (±5%) : 250 mA

24 V DC (±10%) : 450mA

Joint*6

1/2 SW (standard), 3/4 SW

Mounting posture

Approx. 3500g

Model

DF-200C

Thermal sensor

Valve type

Multiple gases : N2 (Air, H2, He, Ar, O2, CO2)*2

Flow range*3

2 to 100% (F.S.)

Response*4

±1.0%S.P（＞35%F.S.)
±0.35%F.S（≦35%F.S.）

Repeatability

50 to 300kPa (100 to 300kPa for Ar and CO2)

Inlet maximum pressure

980kPa（G）

External leak rate

5〜50℃

Accuracy guaranteed temp.

-10〜60℃

Allowable operating humidity

SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM

Electrical connection

D-sub 9-pin,
KFC standard (SEMI standard compliant),
RJ-45 modular jacks x 2

Flow rate setting signal

0 to 5 V DC (load resistance 10 kΩ)

Digital communication

+15 V DC (±5%): 150 mA,
-15 V DC (±5%): 150 mA

Joint*7

Horizontal installation recommended

Weight*8

Approx. 900g

Flow range (F.S.)
(at N2 calibration conditions)

50SCCM~5SLM

Over 5SLM~20SLM

Applicable gases (dry gas)

N₂, Air, O₂, CO₂, Ar, H₂, He등

Sensor

Thermal coil sensor

Valve actuator

Proportional Solenoid Valve (N/C)

Valve type

Poppet valve *7

Control system

Control/measurement range

2~100% F.S.

Response

0~100% F.S. or more within 2 sec. *1
0~below 10% F.S. within 4 sec. *1

Accuracy

Flow accuracy

±1.0% F.S. *2

±1.5% F.S. *2

Repeatability

±0.75%F.S

Pressure

Proof pressure

1000kPa(G)

Allowable operating pressure

500kPa(G) or less

Operating differential pressure *7

50~300kPa(G)

100~300kPa(G)

Temperature

Allowable operating temperature

5~45℃

Temperature characteristics

0.2% F.S./ ℃

Humidity

Allowable operating humidity

10~90% (No condensation allowed)

Leak

He Leak rate

1×10^-8Pa・m³/sec or less *3

Flow setting method

Digital

(1)   Setting & display unit
(2)   Communications
(3)   Event input selection

Analog *7

(1) 0–5 V (2) 4–20 mA
(freely selectable)

Flow rate output

Analog

(1) 0–5 V
(2) 4–20 mA
(interlocked with the above)

Display

Display format

7-segment 4-digit LED

Total flow

12 digits *4

Mounting direction

Changeable

Built-in/Separate

Built-in,
separate 1m,
separate 3m,
separate 5m

Status display LED

OK (within allowable range),
ALM (alarm output interlock)
OUT1 (event output 1 interlock),
OUT2 (event output 2 interlock)
SV (set flow),
PV (instantaneous flow),
TF (total flow),
IF (mode setting)

Other I/O
functions

Event input

3 × contact input

Alarm output

1 × open collector output, Max. 35 V, 50 mA

Event output

2 × open collector output Max. 35 V, 50 mA

Communications

RS-485, half-duplex, 9600 bps

Power supply

Rating

24 VDC,
current consumption: 300 mA max.

Allowable supply voltage range

21.6~26.4 VDC
(Ripple: 5% or less)

Mounting position

Not specified

Applicable standards

RoHS and EN62326-1: 2006

Materials of parts in contact
with gases

SUS316, SUS316L, SUS430, FKM, PTFE, chloroprene
rubber (option)

Weight

Built-in: Approx. 1000g
Separate (excluding the cable): Approx. 1200 g *6

Sensor type

Thermal sensor

Valve type

Normally closed proportional solenoid valve

Applicable gases（*1）

N₂, Air, H₂, He, Ar, O₂, CO₂ etc.

(Gases not specifically mentioned here are subject to calibration for N₂ equivalent.)

Flow range（*2）

10SCCM~5SLM

Control（measure）range

2~100% (F.S.)

Response

≤ 1sec （within ±2% F.S.）

Accuracy

±1.0%S.P. (25%F.S.~100%F.S.), ±0.25%F.S. (～25%F.S.)

Repeatability

±0.2% F.S.

Operating differential pressure（*3）

50~300kPa（Ar, CO₂：100kPa～300kPa）

Inlet maximum pressure

300kPa (G)

Proof pressure

980kPa (G)

External leak rate（He）

≤ 1.0 × 10^-11Pa・m³/sec

Temperature

Working temp.

5~50℃

Accuracy guaranteed temp.

15~35℃

Allowable storage temp.

-10~60℃

Allowable operating humidity

10~90%RH (without dew condensation)

Materials of gas contact part

SUS316L, PTFE, Ni-Co

Electrical connection

Dsub 9pin KFC Standard（SEMI standard compliant）

HR-10A X 2

Flow rate setting signal

0~5VDC(input impedance: approx. 1MΩ)

or 4~20mA(input impedance: approx. 250Ω)

Flow rate output signal

0~5VDC( load resistance ≧10k Ω)

or 4~20mA( load resistance ≧500 Ω)

Digital communication

RS485　rotary-switch address setting

Required power supply (DC)

+15VDC (±5%) 100Ma, -15VDC (±5%) 150mA

or +24VDC（±10%）≤180mA　 (MFM would be≤100mA)

Joint

1/4 VCR

Mounting posture

Free

Weight

Approx. 800g

Sensor type

Normally closed proportional solenoid valve

Applicable gases（*1）

(Gases not specifically mentioned here are subject to calibration for N2 equivalent.)

Flow range（*2）

2~100%(F.S.)

Response

± 1.0%F.S.

Repeatability

50~300kPa（Ar, CO2 : 100kPa~300kPa）

Inlet maximum pressure

980kPa (G)

External leak rate (He)

Working temp.

5~50℃

Accuracy guaranteed temp.

15~35℃

Allowable storage temp.

-10~60℃

Allowable operating humidity

SUS316, SUS316L, magnetic stainless steel(*5), PTFE, FKM

Electrical connection

HR-10A

Flow rate setting signal

0~5VDC(input impedance: approx. 1M Ω)
or 4~20mA(input impedance: approx. 250 Ω)

Flow rate output signal

0~5VDC( load resistance ≧10k Ω)

or 4~20mA( load resistance ≧500 Ω)

Digital communication

RS485 rotary-switch address setting

Required power supply (DC)

or +24VDC（± 10%)  ≤180mA (MFM would be ≤100mA)

Joint（*6）

Horizontal installation recommended.

Weight（*7）

Approx.500g

Model

30SLM-100SLM

Sensor

Normally-closed proportional solenoid valve

Control/measurement range (*1)

5-100% F.S.

Response (*1)

Within 3 seconds
(within +/-2% F.S.)

Accuracy

±0.2% F.S./°C (15-35°C)

Applicable gases (dry gas)

±0.5% F.S.

Operating differential pressure (*1)

Option: Lowe differential pressure (LP) etc.

Allowable operating pressure (*1)

980kPa (G)

He leak rate (*2)

5-45°C

Allowable operating humidity

with gases

Body: SUS316, SUS316L

Valve sheet: FKM (option: CR or NBR)

Sealing: FKM (option: CR or NBR)

Electrical connection

0-5VDC or 4-20mA (Choose at the time of order)

Flow rate output

RS232C or RS485 (Choose at the time of order)

Other functions

24VDC +/-10% (ripple5%), current consumption: less than 300mA

Joint

Approx. 1500g

Flow range
(N2 equivalent, 20°C/1 atm)

1 SCCM–20 SLM
(The conditions are freely selectable)

Sensor

Proportional solenoid valve
(closed when not energized)

Control range

1 sec. or less (0–100% within ±2% typical)

Accuracy

±1% F.S.
(Accuracy guaranteed at 15–35°C)

Repeatability

F.S. ≤ 5 SLM: 50–300 kPa

F.S. > 5 SLM: 100–300 kPa

Option: Low differential pressure (LP) specification is available depending on conditions.

Allowable operating pressure

980 kPa (G)

Leak rate

0–50°C

Allowable ambient humidity

10–90% (No condensation allowed)

Materials of parts in contact
with gases

Body: SUS316L

Diaphragm:SUS316L

Valve seat: PTFE

Sealing: SUS316L, Ni, Au

Option: SUS seal (SU), inner surface polish (KP)

Electric connection

Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

Flow rate input signals

Flow rate output signals

0–5 VDC (External load resistance: 250 kΩ or more)

Required power supply

+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA

Standard: 1/4 VCR equivalent Option: 1/4 SWL

Weight

Approx. 1000 g

Flow range
(N2 equivalent, 20°C/1 atm)

Thermal mass flow sensor

Valve type

Control range

2–100% (F.S.)

1 sec. or less (0–100% within ±2% typical)

Accuracy

±0.2%F.S.

Operating differential pressure

F.S.> 5 SLM: 100–300 kPa (G)

Option: Low differential pressure (LP) specification is available depending on conditions

Allowable operating pressure

Proof pressure

980 kPa (G)

1 × 10^-8 Pa·m³ /s or less (excluding permeation of He)

Allowable ambient temperature

10–90% (No condensation allowed)

Materials of parts in contact with gases

Diaphragm: SUS316

Valve seat: FKM (option: CR, NBR or perfluor)

Sealing: FKM (option: CR, NBR or perfluor)

Electric connection

0–5 VDC (Input impedance: 1 MΩ or more)

Flow rate output signals

+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA

Joint (Main unit bore)

Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc.

Weight

1000 g

Model

30 SLM–100 SLM (freely selectable)

Sensor

Proportional solenoid valve (closed when not energized)

Control range

3 sec. or less (0–100% within ±2% typical)

Accuracy

Temperature coefficient

±0.2 F.S./°C (15–35°C)

±0.5%F.S.

Operating differential pressure

F.S. > 50 SLM: 200–300 kPa (G)

Option: Medium differential pressure (MP) and low differential pressure (LP) specifications are available.

Allowable operating pressure

500 kPa (G) or less

Proof pressure

1 × 10^-8 Pa·m³ /s or less (excluding permeation of He)

Allowable ambient temperature

Allowable ambient humidity

10–90% (No condensation allowed)

Body: SUS316

Valve seat: FKM (option: CR or NBR)

Sealing: FKM (option: CR or NBR)

Electric connection

0–5 VDC (Input impedance: 1 MΩ or more)

Flow rate output signals

+15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA

Joint (Main unit bore)

Standard: 3/8SWL Option: 1/2SWL 3/8VCR RC3/8, etc.

Weight

Approx. 1500 g