MFM-Gas-Kofloc Archives - (주)엘피엠테크-LPMTECH https://lpmtech.co.kr/portfolio_category/mfm-gas-kofloc/ 농축기, 세포배양기, 레귤레이터, 가스혼합기, MFC, 스태틱믹서, 유량계 등 실험장비 및 유체 계측/혼합장비 전문업체 Fri, 19 Jun 2020 08:55:10 +0000 ko-KR hourly 1 https://wordpress.org/?v=6.7.4 EX-250SM https://lpmtech.co.kr/portfolio-items/ex-250sm/ Tue, 21 Apr 2020 02:42:53 +0000 http://lpmtech.co.kr/?post_type=avada_portfolio&p=18220 Compact Digital MFM EX-250SM » MFM type : Digital » Range : 10SCCM~5SLM » Applicable gases : N2, Air, H2, He, Ar, O2, CO2 » Sensor : Thermal sensor » Response : ≤ 1sec （within ± 2%F.S.） » Accuracy : ±1.0% F.S. » Repeatability : ±0.2% F.S. [...]

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Compact Digital MFM

EX-250SM

» MFM type : Digital
» Range : 10SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Response : ≤ 1sec （within ± 2%F.S.）
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.2% F.S.
» Output : 4-20mA, 0-5VDC

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EX-250SM은 소형임에도 불구하고 RS 485 통신으로 높은 정확도와 빠른 응답을 실현합니다.

특징

» 높은 정확도 및 안정성, 빠른 반응
» Rotary Switch 전환으로 본체에 등록되어 있는 가스 종류 사용 가능
(N2, Air, H2, He, Ar, O2, CO2)
» RoHS 및 CE 인증품

적용분야

» 연구/실험실

Standard Specifications

Sensor type

Thermal sensor

Applicable gases *1

N2, Air, H2, He, Ar, O2, CO2
(The other gases are N2 gas conversion)

Flow range *2

10SCCM-5SLM

Control range

2-100% (F.S.)
Response

Total flow rate control range ±1 sec (within ±2% F.S.)

Accuracy *3

±1.0%F.S.
Repeatability

±0.2%F.S.

Inlet maximum pressure

500kPa (G)
Proof pressure

980kPa (G)

External leak rate *5

≦ 1×10-8Pa·m3/sec
Working temp.

5-50°C

Accuracy guaranteed temp.

15-35°C

Allowable storage temp.

-10-60°C
Allowable operating humidity

10-90% RH (without dew condensation)

Materials of gas contact part

SUS316, SUS316L, Magnetic stainless steel (*6), PTFE, FKM

Electrical connection

Dsub9 pin KFC Standard (SEMI standard) HR-10A
Flow rate output signal

0-5VDC or 4-20mA

Digital communication

RS485
Required power supply (DC)

+15VDC (+/-5%) less than 100mA, -15VDC (+/-5%) less than 150mA Or +24VDC (+/-10%) less than 180mA (MFM: less than 100mA)

Joint *7

1/4SWL type (standard)
Mounting posture

Horizontal installation recommended

Weight *8

Approx. 440g

(*1) Dry gas and clean gas not included the corrosive particles and dust/mist.
(*2) SCCM: cc/min at 0°C, 1atm SLM: L/min at 0°C, 1atm
(*3) Accuracy of the full scale flow rate
(*5) Permeation is not included. The leakage by prolonged permeation shall not exceed 1×10-6Pa/m3/sec
(*6) No use of the magnetic stainless steel
(*7) Contact us about the connection.
(*8) Weight without the connections

Dimensions

* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.

  카달로그 – Kofloc EX-250SM_Catalogue (EN)

The post EX-250SM appeared first on (주)엘피엠테크-LPMTECH.

]]> EX-700 https://lpmtech.co.kr/portfolio-items/ex-700/ Tue, 21 Apr 2020 01:54:06 +0000 http://lpmtech.co.kr/?post_type=avada_portfolio&p=18214 Digital Mass Flow Meter with Display EX-700 » MFM type : Digital » Range : 10/50/100/500 SCCM, 1/5/10/20 SLM » Applicable gases : N2, Air, H2, He, Ar, O2, CO2 » Sensor : Thermal sensor » Response : 2 sec. or less » Accuracy : ±1.0% F.S. [...]

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Digital Mass Flow Meter with Display

EX-700

» MFM type : Digital
» Range : 10/50/100/500 SCCM, 1/5/10/20 SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Response : 2 sec. or less
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.2% F.S.
» Analog output : 4-20mA, 0-5V, 1-5V

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특징

» 디스플레이 부착
» 풀스케일 10sccm~200SLM
» RS485 통신 기능
» RoHS / CE 준수
» 컴팩트한 디자인
» 단일 전원 공급 장치
» 가스 선택 스위치

적용분야

» 연구/실험실

Standard Specifications

Sensor type

Thermal sensor
Flow range (N2)10/50/100/500SCCM
1/5/10/20SLM

50/100/200SLM

Gas

N2 (Air, H2, He, Ar, O2, CO2/
Change the gas type by conversion factor)

N2 (Air, Ar /
Change the gas type by conversion factor)

Response

2 sec. or less
Accuracy±1.0%F.S. (25°C)

±1.5%F.S.(25°C)

Temperature characteristics

±0.2%F.S./°C (15～35°C) *(±0.4%F.S./°C, 200SLM only)
Repeatability

±0.2%F.S.

Proof pressure

980kPa(G)
Working temp.

5-50°C

Allowable stock temperature

-10-60°C
Allowable operating
humidity

10-90% RH (without dew condensation)

Materials of gas contact part

SUS316, SUS316L, PTFE, FKM (Option NBR, CRP)
Electrical connection

DC power plug and D-sub 9 pin male

Digital communication

RS485 (MODBUS protocol, RTU mode) ID:1-247
Required power supply (DC)

24VDC (±10%) less than 100mA

Joint

1/4SWL type (standard)3/8SWL type (standard)
Precision needle vale (option)MODEL2412 (Catalog P116)

MODEL2412D (Catalog P125)

Mounting posture

Horizontal installation recommended
Output

Output method

NPN open collector (max. DC30V, 50mA)

Output number

2 outputs

Event output

LED (OUT1, OUT2)
Analog output (*4)

① 4-20mA (less than 500Ω) ② 0-5V (more than 10Ω) ③ 1-5V (more than 10Ω)

Weight

Approx. 600g (without fittings)

Approx. 700g (without fittings)

(*1) Dry gas and clean gas not included the corrosive particles and dust/mist. Except for nitrogen gas, gas type is switched by the conversion factor.
(*2) Warranty by N2 gas only
(*3) Same full scale range with N2 gas after change of gas but no accuracy warranty.
(*4) In ordering, select the voltage or the currency.

Dimensions

* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.

  카달로그 – Kofloc EX-700_Catalogue (EN)

The post EX-700 appeared first on (주)엘피엠테크-LPMTECH.

]]> EX-550M https://lpmtech.co.kr/portfolio-items/ex-550m/ Tue, 21 Apr 2020 02:55:34 +0000 http://lpmtech.co.kr/?post_type=avada_portfolio&p=18228 All metal digital MFM EX-550M » MFM type : Digital » Range : 10SCCM~5SLM » Applicable gases : N2, Air, H2, He, Ar, O2, CO2 etc. » Sensor : Thermal sensor » Response : ≤ 1sec （within ± 2%F.S.） » Accuracy : ±1.0%S.P. (25%F.S.~100%F.S.) , ±0.25%F.S. (~25%F.S.) » [...]

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All metal digital MFM

EX-550M

» MFM type : Digital
» Range : 10SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2 etc.
» Sensor : Thermal sensor
» Response : ≤ 1sec （within ± 2%F.S.）
» Accuracy : ±1.0%S.P. (25%F.S.~100%F.S.) , ±0.25%F.S. (~25%F.S.)
» Repeatability : ±0.2% F.S.
» Output signal : 0-5VDC or 4-20mA
» Electric connection : D-sub 9pin KFC Standard (SEMI standard compliant)
» Digital communication : RS485 rotary-switch address setting

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EX-550M 시리즈는 Metal seal 구조로 고정도 계측이 가능한 제품입니다.

특징

» 빠른 응답, 제로점 안정성
» 0~5VDC 또는 4~20mA 입력/출력 신호 및 ±15VDC 또는 24VDC 전원 공급 장치
» Rotary Switch 전환으로 본체에 등록되어 있는 가스 종류 사용 가능

(N2, Air, H2, He, Ar, O2, CO2)

» RoHS 및 CE 인증품

적용분야

» 연구/실험실
» 각종 분석기기

Standard Specifications

Sensor type

Thermal sensor
Applicable gases *1

N2, Air, H2, He, Ar, O2, CO2
(The other gases are N2 gas conversion)

Flow range *2

10SCCM-5SLM
Control range

2-100% (F.S.)

Response

Total flow rate control range ±1 sec (within ±2% F.S.)
Accuracy

±1.0%S.P. (25%F.S.-100%F.S.) , ±0.25%F.S. (-25%F.S.)

Repeatability

±0.2%FS
Inlet maximum pressure

350kPa (G)

Proof pressure

980kPa (G)
External leak rate

≦ 1×10-11Pa·m3 /sec

Working temp.

5-50°C
Accuracy guaranteed temp.

15-35°C

Allowable storage temp.

-10-60°C
Allowable operating humidity

10-90% RH (without dew condensation)

Materials of gas contact part

SUS316L, Magnetic stainless steel, PTFE, Ni-Co
Electrical connection

Dsub9 pin KFC Standard（SEMI standard)
HR-10A×2

Flow rate output signal

0-5VDC or 4-20mA
Digital communication

RS485

Required power supply (DC)

+15VDC (+/-5%) less than 100mA, -15VDC (+/-5%) less than 150mA
Or +24VDC (+/-10%) less than 180mA (MFM: less than 100mA)

Joint

1/4VCR type (standard)

Mounting posture

Not specified

Weight

Approx. 550g

(*1) Dry gas and clean gas not included the corrosive particles and dust/mist.
(*2) SCCM: cc/min at 0°C, 1atm SLM: L/min at 0°C, 1atm

Dimensions

* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.

  카달로그 – Kofloc EX-550M_Catalogue (EN)

The post EX-550M appeared first on (주)엘피엠테크-LPMTECH.

]]> 3760 https://lpmtech.co.kr/portfolio-items/3760/ Tue, 21 Apr 2020 06:39:01 +0000 http://lpmtech.co.kr/?post_type=avada_portfolio&p=18250 Standard Mass Flow Meter 3760 Series » MFM type : Analog » Range : 10SCCM~20SLM » Sensor : Thermal mass flow sensor » Response : 2 sec. or less » Accuracy : ±1.0% F.S. (25°C) » Repeatability : ±0.5%F.S. (20℃) » Output signal : 0–5 VDC (External load [...]

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Standard Mass Flow Meter

3760 Series

» MFM type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Response : 2 sec. or less
» Accuracy : ±1.0% F.S. (25°C)
» Repeatability : ±0.5%F.S. (20℃)
» Output signal : 0–5 VDC (External load resistance: 250 kΩ or more)
» Electric connection : Dsub 9-pin connector as per KFC Standard

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3760 시리즈는 3660 시리즈를 기반으로 개발된 소형의 저렴한 MFM입니다.
대학 및 연구소의 연구 개발을 위한 다양한 분석기 및 진공 장비의 표준모델로 개발되었습니다.

특징

» 대응 온도차 검출형 유량 센서의 개량으로 빠른 응답성 실현
» 컴팩트한 사이즈

적용분야

» 연구/실험실
» 각종 분석기기 및 진공장치

Standard Specifications

Flow range
(N2 equivalent, 20°C/1 atm)

10 SCCM–20 SLM (freely selectable)
Sensor

Thermal mass flow sensor

Response

2 sec. or less
Accuracy

±1.0%F.S. (25℃)

Temperature coefficient

±0.1 F.S./°C (15–35°C)
Repeatability

±0.5%F.S. (20℃)

Proof pressure

980kPa (G)
Leak rate

1 × 10-8 Pa·m3 /s or less (excluding permeation of He)

Allowable ambient temperature

5–45°C
Allowable ambient humidity

10–90% (No condensation allowed)

Materials of parts in contact with gases

Body: SUS316

Sealing: FKM (option: CR or NBR)

Electric connection

Dsub 9-pin connector as per KFC Standard
(Compliant with SEMI Standard)
Flow rate output signals

0–5 VDC (External load resistance: 250 kΩ or more)

Required power supply

+15VDC (±5%) 100Ma, −15VDC (±5%)100mA
Joint (Main unit bore)

Standard: 1/4SWL
Option: 1/8SWL 1/4VCR RC1/4, etc.

Weight

Approx. 800g

 

 

Dimensions

* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.

  카달로그 – Kofloc 3760_Catalogue (EN)

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]]> 5410 https://lpmtech.co.kr/portfolio-items/5410/ Tue, 21 Apr 2020 05:47:43 +0000 http://lpmtech.co.kr/?post_type=avada_portfolio&p=18241 Low-cost Metal Sealed Mass Flow Meter 5410 Series » MFM type : Analog » Range : 10SCCM~20SLM » Sensor : Thermal mass flow sensor » Accuracy : ±1.0% F.S. (20°C) » Repeatability : Within ±0.2% F.S. (20°C) » Output signal : 0–5 VDC » Electric connection : Dsub [...]

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Low-cost Metal Sealed Mass Flow Meter

5410 Series

» MFM type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Accuracy : ±1.0% F.S. (20°C)
» Repeatability : Within ±0.2% F.S. (20°C)
» Output signal : 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard

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5400 시리즈는 3440의 후속 모델로, 센서 구동 시스템이 개선되었습니다. 제로 드리프트가 더욱 줄어들고 더 낮은 범위의 응답이 향상됩니다.

특징

» 각 설정 범위의 제어 및 응답 향상
» 설정 전압에 대한 기능 향상 (ramping 사양 지원)
» 온도 추종형 전류차 검출 방식의 유량센서를 탑재하여 높은 정확도 및 빠른 응답 실현
» Conversion factor 교환 기능 – 멀티 가스 대응

적용분야

» 연구/실험실
» 각종 분석기기

Standard Specifications

Model

5410
Flow range (N2 equivalent, 20°C/1 atm)

10 SCCM–20 SLM (freely selectable)

Sensor

Thermal mass flow sensor
Accuracy

±1% F.S. (20°C)

Repeatability

Within ±0.2% F.S. (20°C)
Allowable operating pressure

300 kPa (G) or less

Proof pressure

980 kPa (G)
Leak rate

1 × 10-11 Pa·m3 /s or less

Allowable ambient temperature

0–50°C (Accuracy guaranteed at 15–35°C, ±0.1% F.S./°C)
Allowable ambient humidity

10–90% (No condensation allowed)

Materials of parts in contact
with gases

Body: SUS316L

Diaphragm: Ni-Co

Valve seat: PTFE

Sealing: SUS316L, Ni

Electric connection

Dsub 9-pin connector as per KFC Standard
(Compliant with SEMI Standard)

Flow rate output signals

0–5 VDC
(Minimum load resistance: 250 kΩ or more)
Required power supply

+15 VDC (±5%) 100 mA, −15VDC (±5%) 100mA

Joint (Main unit bore)

Standard: 1/4 VCR equivalent Option: 1/4 SWL

Weight

Approx. 800 g

 

 

Dimensions

* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.

  카달로그 – Kofloc 5410_Catalogue (EN)

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