Accuracy

±2% RD for flow > 50% of max. capacity;
±(1% RD + 0,5% FS) on lower flows

Repeatability

< 0.2% FS typical
< 0.6% FS typical for MV-108 / MV-308

Pre-installed gases

Air, Ar, N2, O2, CO2, CH4, C3H8, N2O, CO and C4H10
Air, N2, O2, CO (models MV-101, MV-301 and MV-401)
(special models available for H2 and Helium)

Type of gases

Any clean and dry gas, filter recommended

Standard calibration gas

Air, other gases are converted using our Fluidat® conversion
model which will introduce extra inaccuracy

Rangeability

up to 1:100

Operating pressure

0…10 bar(g) / 0…150 psi(g)

Pressure coefficient

± 0.2% RD/bar typical at Air

Operating temperature

0…50 °C (32…122 °F)

Temperature coefficient

Zero: <0.1% FS/℃, Span: <0.2% RD/℃

Attitude sensitivity

< 0.1% FS

Response time (t63%)

2S

min. Δp

1 bar(d) (for model MV-405 2 bar(d))

max. Δp

7 bar(d)

Control Accuracy

Less than 05-1% RD/bar

Materials (wetted parts)

Meter: aluminium, Viton®
Needle valve: SS316, Viton®, PTFE;
(for models MV-3×2 and MV-4xx: Fluorosint®, Brass, Buna N)
Controller: membrane fiber-reinforced nitrile

Gas connections (in/out)

G 1/4” BSPP female thread
G ½” BSPP female thread for MV-108 / MV-308
(compression fittings optional)

Weight

meter/regulator: 0.7 kg
controller: 1.4 kg
MV-108 / MV-308: 0,8 kg

Electrical connection

8-pin RJ-45 modular jack

Output

analog: 0…5 Vdc
digital: RS232 / RS485 (Modbus ASCII/RTU)

Required supply voltage

15…24 Vdc (+/-10%)

Power consumption

approx. 135 mA

Min. and max. relay contacts

switching current 0.5 A, 24 Vdc,
one side grounded (0 Vdc power)

Test pressure

21 bar(a) / 300 psi(a)

Ingress protection

IP40

EMC

EU declaration

Flow range
(intermediate ranges available)

min. 0.2…10 ml/min
max. 0.1…5 l/min
(based on N2)

Accuracy (incl. linearity)
(based on actual calibration)

< ±1.5% RD + ±0.5% FS
(Based on calibration with actual gas, at ambient temperature and at customer specified inlet pressure. Horizontal mounting position.)

Repeatability

for flows < 20 ml/min: < ±0.5% FS; for flows > 20 ml/min: < ±0.5% RD

Turndown ratio

0 … 10 barg

Fluids

Dry, clean, non-corrosive gases. Standard calibration gases Air, N₂, Ar, He, CO₂ and H₂. Other dry, clean, non-corrosive gases on request (O₂, CO, …)

Multi fluid capability

(in control, typical)

t98% down to 300 msec,
700 msec typical

Operating temperature

span: 0.2% RD/°C; zero: 0,01 ml/min/°C

Max. Kv-value

1 x 10^-8 mbar∙l/s He

Attitude sensitivity

max. error at 90° off horizontal 0,5ml/min at 1 bar, typical N₂

Material (wetted parts)

optional: 10-32 UNF threaded internal
nut with 1/16” ferrule (SS316 or Peek);
1/16” or 1/8” OD compression type

Seals

Weight

0.2 kg

IP40

Max. differential pressure
across control valve

9 bar dif.

Readout sample time

+15 … 24 Vdc

Max. power consumption

0…5 (10) Vdc or 0 (4)…20 mA
(sourcing output)

Digital communication

RS232, RS485
(Modbus-RTU/ASCII or FLOW-BUS)

Power/Analog/RS232/RS485

RJ45 modular jack

Accuracy (incl. linearity)
(based on actual calibration)

standard: ±1% FS;
other on request
(for flow > 1000 m³ n/h contact factory)

Turndown

< ±0.2% Rd

Time constant

5 seconds

Operating temperature

EX-FLOW sensor: -10…+70°C;
XB-coil: -40…+ 65°C
XC-coil: -40…+ 65°C

Temperature sensitivity

zero: < ±0.05% FS/°C;
span: < ±0.05% Rd/°C

Leak integrity

max. error at 90° off horizontal 0.2%
at 1 bar, typical N2

Material (wetted parts)

compression type or face seal couplings;
wafer type on series F-106;
DIN or ANSI flanges on series F-107

Seals

standard: Viton®
options: EPDM, FFKM (Kalrez®)

Ingress protection (housing)

IP65

Signal circuit

type of explosion protection: intrinsic safety Ex ib IIC, only for connection to a certified intrinsically safe circuit with the following maximum values:
Ui = 28 V, Ii = 98 mA, Pi = 686 mW
The effective internal capacitance between:
Terminals 1 and 3: Ci = 1 nF;
Effective internal inductance: Li = 0.3 mH

Output signal

15…20 mA (linear)
Terminal connection, cable gland M16x1.5

XB-coil

Coil voltage max. 28 V/110mA;
295 Ohm at 20°C, cable gland M20x1.5

XC-coil

Coil voltage max. 24 V;
65 Ohm at 20°C, cable gland M20x1.5;
Pmax = 9W at 20°C

Model

0.2…10 ml/min

F-111BX

2…100 l/min

F-112AX

25…1250 l/min

F-116AX

10…50 m³/h

Model

4…200 m³/h

1…50 m³/h

10…500 m³/h

20…1000 m³/h

F-106DX/F-107DX/F-117DX

80…4000 m³/h

F-106FX

220…11000 m³/h

Accuracy (incl. linearity)
(based on actual calibration)

standard: ±0,5% Rd plus ±0,1% F.S.
(±1% FS for ranges 3…5 mln/min;
±2% FS for ranges < 3 mln/min)

Turndown

< 0,2% Rd

Settling time (controller)

< ±0,1% FS (typical for 1 ln/min N₂)

Operating temperature

zero: < 0,05% FS/°C; span: < 0,05% Rd/°C

Pressure sensitivity

tested < 2 x 10^-9 mbar l/s He

Attitude sensitivity

max. error at 90° off horizontal 0.2%
at 1 bar, typical N₂

Warm-up time

30 min. for optimum accuracy
2 min. for accuracy ± 2% FS

Material (wetted parts)

compression type or face seal couplings

Seals

standard: Viton®;
options: EPDM, Kalrez® (FFKM)

Ingress protection (housing)

IP40

min. 0,5…50 kg/h
max. 6…600 kg/h

Mass flow accuracy

Liquid: ±0.2% of rate;
Gas: ±0.5% of rate

Turndown

±0.1% of rate

Zero Stability (ZS)

– standard: 0…70°C;
– max. 50°C for ATEX Cat.3, Zone 2;
– max. 120°C (ambient+fluid) for special version with remote electronics (130°C ≤ 1 hour allowed for CIP)

Mounting

Outboard < 2 x 10^-9 mbar l/s He

Warm-up time

> 30 min. for optimum accuracy

stainless steel 316L or comparable

Pressure rating

compression type or face seal couplings

Seals

IP65 (weatherproof)

Power supply

+15…24 Vdc +/- 10%
Max. ripple recommended: 50 mV tt

Meter: approx. 80 mA at 15 Vdc

Analog output

0…5 (10) Vdc, min. load impedance > 2 kΩ;
0 (4)…20 mA (sourcing), max. load impedance < 375 Ω

Analog setpoint
(for MFM + pump or control valve)

0…5 (10) Vdc, min. load impedance > 424 kΩ;
0 (4)…20 mA (sourcing), max. load impedance ~ 250 Ω

Digital communication

standard: RS232;
options: PROFIBUS DP, DeviceNet™, Modbus RTU, FLOW-BUS

8-pin DIN (male);

PROFIBUS DP

bus: 5-pin M12 (female);
power: 8-pin DIN (male);

Devicenet™/FLOW-BUS/Modbus

5-pin M12 (male);

Minimum full scale

100g/h

Maximum full scale

50mg/h

1:4000

Mass flow accuracy

Repeatability

approx. 1 /2 hour after power up
for optimum performance

Zero stability (ZS)

< ±5 kg/m³

Temperature accuracy

±0.5 °C

on zero: < 10°C
on span: <0,005% Rd/°C
self heating (at zero flow): < 10°C

Mounting

0…70°C

Response time, meter (t98%)

±1s (<2% of setpoint)

Material (wetted parts)

Single tube, DN 0.25;
frequency 170 Hz ±20 Hz

Process connections (welded)

Kalrez®

Ingress protection (housing)

Piezoelectric + metal plunger

Leak integrity

200 bar

Power supply

max. 2.5 W

Analog output

0…5 (10) Vdc, min. load impedance > 2 kΩ;
0 (4)…20 mA (sourcing),
max. load impedance < 375 Ω

Analog setpoint

0…5 (10) Vdc, min. load impedance > 100 kΩ;
0 (4)…20 mA, load impedance ~250 Ω

Digital communication

Standard RS232; Options: PROFIBUS DP, DeviceNet™,
Modbus RTU/ASCII, FLOW-BUS, EtherCAT®,
PROFINET

Analog/RS232

bus: 9-pin D-connector (female);
power: 9-pin male D-connector (male)

DeviceNet™

RJ45 modular jack

EtherCAT®/PROFINET

2 x RJ45 modular jack (in/out)