High Performance MFM
» Range : lowest range 0.014…0.7ml/min
up to highest range 2…100l/min
» Accuracy : standard: ±0.5% Rd plus ±0.1% FS
» Connections : compression type or face seal couplings
» Operating pressure : 100 bar
» Output signal : Analog, RS232
» Warm-up time : 30 min. for optimum accuracy
For High Purity Gas Supply with Fast Response
» Range : lowest range 0.12…6mL/min
highest range 1…50L/min
» Accuracy : ± 0.5% Rd plus ± 0.1% FS
» Connections : 1/4” face seal male
» Operating pressure : max. 1500 psig
» Output signal : Analog, RS232
» Warm-up time : 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Laboratory style GAS MFM
» Range : lowest range 0.014…0.7mL/min
highest range 8…1670L/min
» Accuracy : standard : ±0.5% Rd plus ±0.1%FS
» Connections : compression type or face seal couplings
» Operating pressure : 100 bar
» Output signal : Analog, RS232
» Warm-up time : 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Precision MFM for Gases
» Range : lowest range 0.2…5kg/h
up to highest range 6…600kg/h
» Accuracy : 0.2% of rate
» Connections : 1/4″, 6mm OD compression type
» Operating pressure : max. 200 bar
» Output signal : Analog, RS232
» Warm-up time : > 30 min. for optimum accuracy
Ultra Low Flow Coriolis MFM
» Range : lowest range 0.05…5g/h
up to highest range 3…300kg/h
» Accuracy : ±0.5% of rate
» Connections : compression type (welded) or face seal couplings
» Operating pressure : max. 200 bar
» Output signal : Analog, RS232
» Warm-up time : > 30 min. for optimum accuracy
EX-Proof Mass Flow Meter for Gases
» Range : lowest range 0.16…8ml/min
up to highest range 220…11,000m3/h
» Accuracy : ±1% of rate
» Connections : compression type or face seal couplings
wafer type on series F-106
DIN or ANSI flanges on series F-107
» Operating pressure : max. 400 bar
» Output signal : 15…20mA
» Warm-up time : 30 min. for optimum accuracy;
2 min for accuracy ±2% FS
Ultra Compact Mass Flow Meter
» Range : lowest range 0.2…10ml/min
up to highest range 0.1…5l/min
» Accuracy : <±1.5%RD ±0.5%FS
» Connections [Optional] 10-32 UNF threaded internal nut
with 1/16″ ferrule (SS316 or Peek);
1/16″ or 1/8″ OD compression type
» Operating pressure : 0…10barg
» Output signal : 0…5(10)Vdc or 0(4)…20mA
Mass Flow Regulator for gases
» Fluids : Air, N2, O2, H2, He, Ar, and CO2
» Flow range : 1L, 2L, 3L, 5L, 10L, 15L, 20L/min
» Accuracy : F.S. ±5% (Measurement point)
» Proof pressure : 0.8 MPa for 5 L/MIN or less
0.5 MPa for 10 L/MIN or more
» Available scale : 10:1
» Connection [Standard] Rc 1/8
[Option] Rc1/4