» Range : lowest range 0-0.5 sccm / 0-500 sμlm
up to highest range 0-1000 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 10 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 45 psig
» Warm-up Time : < 1 Second
» Range : lowest range 0-0.5 sccm/0-500 sμlm
up to highest range 0-5000 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 10 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 145 psig
» Warm-up Time : < 1 Second
» Range : lowest range 0-0.5 sccm/0-500 sμlm
up to highest range 0-5000 slpm
» Standard Accuracy : ±0.6%
» Optional High-Accuracy : ±0.5%
» Typical Response Time : 5~10ms
» Repeatability : 0.1% of reading +0.02% of full scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 145 psig
» Warm-up Time : < 1 Second