» Range : lowest range 0-0.5 sccm/0-500 sμlm
up to highest range 0-1000 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 100 ms (Adjustable)
» Repeatability : 0.2% of the F.S. range
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 45 psig (60 psia)
» Warm-up Time : < 1 Second
» Range : lowest range 0-0.5 sccm/0-500 sμlm
up to highest range 0-20 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 100 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 145 psig
» Warm-up Time : < 1 Second
» Range : lowest range 0-0.5 sccm/0-500 sμlm
up to highest range 0-5000 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 100 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 145 psig
» Warm-up Time : < 1 Second
» Range : lowest range 0-10 sccm
up to highest range 0-5000 slpm
» Accuracy : ±2% Full Scale
» Typical Response Time : 100 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 320 psig
» Warm-up Time : < 1 Second
» Range : lowest range 0-0.5 sccm / 0-500 sμlm
up to highest range 0-20 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 100 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 145 psig
» Warm-up Time : < 1 Second