Ultra Low Flow Coriolis MFC
» Range : lowest range 0.05…5g/h
up to highest range 3…300kg/h
» Accuracy : ±0.5% of rate
» Connections : compression type (welded) or face seal couplings
» Operating pressure : max. 100 bar
» Settling time : 1 sec.
» Output signal : Analog, RS232
» Warm-up time : > 30 min. for optimum accuracy
Laboratory style GAS MFC for OEM Applications
» Range : lowest range 0.2…10ml/min
highest range 4…200l/min
» Accuracy : ±1% of rate
» Connections : compression type (welded) or face seal coupling
» Operating pressure : max. 10 bar
» Settling time : 1 sec.
» Output signal : Analog, RS232 or Modbus-RTU or -ASCII (RS485)
» Warm-up time : 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
High Performance MFC
» Range : lowest range 0.014…0.7ml/min
up to highest range 2…100l/min
» Accuracy : standard: ±0.5% Rd plus ±0.1% FS
» Connections : compression type or face seal couplings
» Operating pressure : 10/64/100 bar
» Settling time : fast : < 500 msec
standard :< 1 sec
slow : < 2 sec
» Output signal : Analog, RS232
» Warm-up time : 30 min. for optimum accuracy
For High Purity Gas Supply with Fast Response
» Range : lowest range 0.12…6mL/min
highest range 1…50L/min
» Accuracy : ± 0.5% Rd plus ± 0.1% FS
» Connections : 1/4” face seal male
» Operating pressure : max. 1000 psig
» Settling time : 1 second typical above 5% FS;
option: down to 600 msec
» Output signal : Analog, RS232
» Warm-up time : 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Laboratory style GAS MFC
» Range : lowest range 0.014…0.7mL/min
highest range 8…1670L/min
» Accuracy : standard : ±0.5% Rd plus ±0.1%FS
» Connections : compression type or face seal couplings
» Operating pressure : 64/100/200/400 bar
» Settling time : standard: 1…2 seconds
option: down to 500 msec
» Output signal : Analog, RS232
» Warm-up time : 30 min. for optimum accuracy
2 min for accuracy ± 2% FS
Thermal Mass Flow Controllers for Gases
» Range : lowest range 0.16…8 sccm
up to highest range 0.4…20 slm
» Accuracy : ±1% FS (based on actual calibration)
» Connections : 1/4” BSPP female thread;
optional accessories: compression type or face
seal couplings in various inch or metric sizes
» Operating pressure : 30 bar
» Settling time : 1~2 seconds
» Analog output/command : 0…5 Vdc or 4…20 mA
» Warm-up time : 30 min. for optimum accuracy
Precision MFC for Gases (국내방폭인증)
» Range : lowest range 0.2…5 kg/h
highest range 6…600 kg/h
» Accuracy : 0.5% of rate, range 1…100%
» Connections : 1/4” or 6 mm OD compression type
» Operating pressure : M55 – max. 100 bar; M54 – max. 200 bar
» Settling time : approx. 0.5 s
» Output signal : Analog, RS232
» Warm-up time : > 30 min. for optimum accuracy
EX-Proof Mass Flow Controllers for gases
» Range : lowest range 0.16…8ml/min
up to highest range 7.5…375m3/h
» Accuracy : ±1% of rate
» Connections : compression type or face seal couplings
wafer type on series F-106
DIN or ANSI flanges on series F-107
» Operating pressure : max. 400 bar
» Output signal : 15…20m
Ultra Compact Mass Flow Controller
» Range : lowest range 0.2…10ml/min
up to highest range 0.1…5l/min
» Accuracy : <±1.5%RD ±0.5%FS
» Connections [Optional] 10-32 UNF threaded internal nut
with 1/16″ ferrule (SS316 or Peek);
1/16″ or 1/8″ OD compression type
» Operating pressure : min 1.5…8 psi
max. 3…150 psi
» Output signal : 0…5(10)Vdc or 0(4)…20m