High-grade Mass Flow Controller
3200 Series
» MFC type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : 1 sec. or less (0~100% within ±2% typical)
» Accuracy : ±1% F.S. (Accuracy guaranteed at 15–35°C)
» Repeatability : ±0.2%F.S.
» Flow rate signals [Input/Output] 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard
3200 시리즈는 3910 시리즈의 후속품으로 제작된 고급 모델로 아래와 같은 다양한 응용 분야에 광범위하게 사용되고 있습니다.
특징
» 온도추종형 전류차검출방식의 유량센서를 탑재하여 높은 정확도 및 고속 응답 실현
» 안전을 위하여 normally closed valve 사용
» 다이어프램 시트밸브의 채용으로 Dead volume 절감
» F.S. 1SCCM의 미소유량대응 (SR옵션)
» 연소가스 제어용의 저차압대응 (LP옵션)
적용분야
» 반도체
» LCD
» 연소 장비
» 분석 장치
» 생명 공학 분야
Standard Specifications
|
Flow range |
1 SCCM–20 SLM (The conditions are freely selectable) |
| Sensor |
Thermal mass flow sensor |
|
Valve type |
Proportional solenoid valve (closed when not energized |
|
Control range |
2–100% (F.S.) |
| Response |
1 sec. or less (0–100% within ±2% typical) |
|
Accuracy |
±1% F.S. (Accuracy guaranteed at 15–35°C) |
| Repeatability |
±0.2%F.S. |
|
Operating differential pressure |
F.S. ≤ 5 SLM: 50–300 kPa (G) |
|
F.S.> 5 SLM: 100–300 kPa (G) |
|
|
Option: Low differential pressure (LP) specification is available depending on conditions |
|
|
Allowable operating pressure |
300 kPa (G) or less |
|
Proof pressure |
980 kPa (G) |
| Leak rate |
1 × 10-8 Pa·m3 /s or less (excluding permeation of He) |
|
Allowable ambient temperature |
0–50°C |
| Allowable ambient humidity |
10–90% (No condensation allowed) |
|
Materials of parts in contact with gases |
Body: SUS316L |
|
Diaphragm: SUS316 |
|
|
Valve seat: FKM (option: CR, NBR or perfluor) |
|
|
Sealing: FKM (option: CR, NBR or perfluor) |
|
|
Electric connection |
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
| Flow rate input signals |
0–5 VDC (Input impedance: 1 MΩ or more) |
|
Flow rate output signals |
0–5 VDC (External load resistance: 250 kΩ or more |
| Required power supply |
+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA |
|
Joint (Main unit bore) |
Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc. |
|
Weight |
1000 g |
Dimensions
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