High Grade Metal Seal Mass Flow Controller
5100 Series
» MFC type : Analog
» Range : 1SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : 1 sec. or less (0~100% within ±2% typical)
» Accuracy : ±1% F.S. (Accuracy guaranteed at 15~35°C)
» Repeatability : ±0.2%F.S.
» Flow rate signals [Input/Output] 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard
특징
» 용접 구조
» 금속 씰
» 정확도 ≤±1%, 응답 ≤±1%초
» 온도에 따른 전류 차이 감지 기능이 있는 유량 센서를 통해 높은 정확도 및 빠른 응답성
» 용접 구조 및 메탈 씰로 리크 확률이 낮음
» 다이어프램 시트 밸브로 데드 볼륨 축소
적용분야
» 연구/실험실
» 각종 분석기기
» 반도체 공정 제어
Standard Specifications
|
Flow range |
1 SCCM–20 SLM |
|
Sensor |
Thermal mass flow sensor |
| Valve type |
Proportional solenoid valve |
|
Control range |
2–100% (F.S.) |
| Response |
1 sec. or less (0–100% within ±2% typical) |
|
Accuracy |
±1% F.S. |
|
Repeatability |
±0.2%F.S. |
| Operating differential pressure |
F.S. ≤ 5 SLM: 50–300 kPa |
|
F.S. > 5 SLM: 100–300 kPa |
|
|
Option: Low differential pressure (LP) specification is available depending on conditions. |
|
|
Allowable operating pressure |
300 kPa (G) or less |
| Proof pressure |
980 kPa (G) |
|
Leak rate |
1 × 10-11 Pa·m3 /s or less |
| Allowable ambient temperature |
0–50°C |
|
Allowable ambient humidity |
10–90% (No condensation allowed) |
|
Materials of parts in contact |
Body: SUS316L |
|
Diaphragm:SUS316L |
|
|
Valve seat: PTFE |
|
|
Sealing: SUS316L, Ni, Au |
|
|
Option: SUS seal (SU), inner surface polish (KP) |
|
|
Electric connection |
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
|
Flow rate input signals |
0–5 VDC (Input impedance: 1 MΩ or more) |
|
Flow rate output signals |
0–5 VDC (External load resistance: 250 kΩ or more) |
|
Required power supply |
+15 VDC (±5%) 100 mA, −15 VDC (±5%) 200 mA |
| Joint (Main unit bore) |
Standard: 1/4 VCR equivalent Option: 1/4 SWL |
|
Weight |
Approx. 1000 g |
Dimensions
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