MFC with Indicator
DF-200
» MFC type : Digital
» Range : 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : Total flow rate control range ±1 sec (within ±2% F.S.)
» Accuracy : ±1.0% S.P. (> 35% F.S.)
» Repeatability : ±0.25% F.S.
» Flow rate signals [Setting/Output] 0~5V DC
» Digital communication : RS485 rotary switch (up to 99 devices)
DF-200 시리즈는 ±1% SP 정확도와 1초 이내의 응답성을 실현한 MFC 입니다.
또한, 멀티가스/멀티범위 기능으로 필용에 따라 기준가스를 포함한 7개의 가스 및 유량범위를 쉽게 변경하여 사용할 수 있습니다.
특징
» 고정도 (±1 RD), 빠른 응답 (1초 이내)
» 멀티가스/멀티범위
» RS485 통신 기능
» RoHS / CE 준수
적용분야
» 연구/실험실
Standard Specifications
|
Model |
DF-200C |
|
| Sensor type |
Thermal sensor |
|
|
Valve type |
Normally closed proportional solenoid valve | |
| Applicable gases*1 |
Multiple gases : N2 (Air, H2, He, Ar, O2, CO2)*2 |
|
|
Flow range*3 |
10/30/50/100/300/500 SCCM, 1/3/5/10 SLM*2 | |
| Control range |
2 to 100% (F.S.) |
|
|
Response*4 |
Total flow rate control range ±1 sec (within ±2% F.S.) | |
| Accuracy*5 |
±1.0%S.P（＞35%F.S.) |
|
|
Repeatability |
±0.25%F.S. | |
| Operating differential pressure*6 |
50 to 300kPa (100 to 300kPa for Ar and CO2) |
|
|
Inlet maximum pressure |
500kPa（G） | |
| Proof pressure |
980kPa（G） |
|
|
External leak rate |
1.0×10-8Pa・m3/sec（He）max. | |
| Temperature | Working temp. |
5〜50℃ |
|
Accuracy guaranteed temp. |
15〜35℃ | |
| Allowable storage temp. |
-10〜60℃ |
|
|
Allowable operating humidity |
10 to 90% RH (without dew condensation) | |
| Materials of gas contact part |
SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM |
|
|
Electrical connection |
D-sub 9-pin, |
|
|
Flow rate setting signal |
0 to 5 V DC (input impedance: approx. 1 MΩ) | |
| Flow rate output signal |
0 to 5 V DC (load resistance 10 kΩ) |
|
|
Digital communication |
Address setting with RS485 rotary switch : up to 99 devices (9600 bps) | |
| Required power supply (DC) |
+15 V DC (±5%): 150 mA, |
|
|
Joint*7 |
1/4 F900 (standard), 1/4 UJR, Rc 1/4 | |
| Mounting posture |
Horizontal installation recommended |
|
|
Weight*8 |
Approx. 900g |
|
(*1) The use of the dedicated software allows it to change the gas types and full scale range within 30% to 100% of the specified full scale (FS).
(*2) The flow rate units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0℃ and 1 atm.
(*3) Guarantee for calibration gas :N2
(*4) Accuracy for calibration gas: N2, flow range (max. full scale)
(*5) The operating differential pressure may differ depending on specifications.
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.