Accuracy

Standard: ±1.0% of full scale including linearity under calibration conditions (±2.0% of full scale for 180M from 201 to 300 slpm)

High Accuracy Calibration: ±0.5% of reading + 0.3% of full scale at calibration conditions

Dial-A-Gas

±0.2% of full scale

Temperature Coefficient

±0.01% of full scale per psi (0.15% of full scale per bar), or better

Response Time

300 millisecond time constant; 2 seconds typical to within ±2% of final value (includes settling time). Faster or slower available upon request.

Mass Flow Rates

180M Medium Flow Size: 0-10 to 0-200 slpm full scale
180H High Flow Size: 0-100 to 0-1000 slpm full scale
Flow range specified is for an equivalent flow of nitrogen at
760 mm Hg and 21°C (70°F); other ranges in other units are available
(e.g., nlpm, scfh, NM³/H, kg/H)

Gas Pressure

500 psig (34.5 barg) maximum, burst tested to 750 psig (52 barg)

Gas & Ambient
Temperature

Gas: 32°F to 122°F (0°C to 50°C)
Ambient: -5 to 122°F (-20 to 50°C)

Leak Integrity

5 X 10^-9 atm. cc/sec of helium maximum
Power Requirements (ripple should not exceed 100 mV peakto-peak) For All Mass Flow Meters: 15-24 VDC ±10%, (130 mA, regulated).

For Mass Flow Controllers:
C180M: 24 VDC ±10%, (700 mA, regulated)
C180H: 24 VDC ±10%, (1260 mA, regulated)

Control Range For Controllers

2 to 100% of full scale flow; automatic shut-off at 1.9 %

Output Signal

Analog:
Linear 4 to 20 mA, 500 ohms maximum loop resistance
and one of the following (user selectable):
Linear 0 to 5 VDC, 1000 ohms minimum load resistance
Linear 0 to 10 VDC, 1000 ohms minimum load resistance
Linear 1 to 5 VDC, 1000 ohms minimum load resistance

Digital:
RS-232
Modbus RTU