Digital Mass Flow Meter with Display
EX-700
» MFM type : Digital
» Range : 10/50/100/500 SCCM, 1/5/10/20 SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Response : 2 sec. or less
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.2% F.S.
» Analog output : 4-20mA, 0-5V, 1-5V
특징
» 디스플레이 부착
» 풀스케일 10sccm~200SLM
» RS485 통신 기능
» RoHS / CE 준수
» 컴팩트한 디자인
» 단일 전원 공급 장치
» 가스 선택 스위치
적용분야
» 연구/실험실
Standard Specifications
|
Sensor type |
Thermal sensor | ||
| Flow range (N2) | 10/50/100/500SCCM 1/5/10/20SLM |
50/100/200SLM |
|
|
Gas |
N2 (Air, H2, He, Ar, O2, CO2/ Change the gas type by conversion factor) |
N2 (Air, Ar / |
|
|
Response |
2 sec. or less | ||
| Accuracy | ±1.0%F.S. (25°C) |
±1.5%F.S.(25°C) |
|
|
Temperature characteristics |
±0.2%F.S./°C (15～35°C) *(±0.4%F.S./°C, 200SLM only) | ||
| Repeatability |
±0.2%F.S. |
||
|
Proof pressure |
980kPa(G) | ||
| Working temp. |
5-50°C |
||
|
Allowable stock temperature |
-10-60°C | ||
| Allowable operating humidity |
10-90% RH (without dew condensation) |
||
|
Materials of gas contact part |
SUS316, SUS316L, PTFE, FKM (Option NBR, CRP) | ||
| Electrical connection |
DC power plug and D-sub 9 pin male |
||
|
Digital communication |
RS485 (MODBUS protocol, RTU mode) ID:1-247 | ||
| Required power supply (DC) |
24VDC (±10%) less than 100mA |
||
|
Joint |
1/4SWL type (standard) | 3/8SWL type (standard) | |
| Precision needle vale (option) | MODEL2412 (Catalog P116) |
MODEL2412D (Catalog P125) |
|
|
Mounting posture |
Horizontal installation recommended | ||
| Output |
Output method |
NPN open collector (max. DC30V, 50mA) |
|
| Output number |
2 outputs |
||
|
Event output |
LED (OUT1, OUT2) | ||
| Analog output (*4) |
① 4-20mA (less than 500Ω) ② 0-5V (more than 10Ω) ③ 1-5V (more than 10Ω) |
||
|
Weight |
Approx. 600g (without fittings) |
Approx. 700g (without fittings) |
|
(*1) Dry gas and clean gas not included the corrosive particles and dust/mist. Except for nitrogen gas, gas type is switched by the conversion factor.
(*2) Warranty by N2 gas only
(*3) Same full scale range with N2 gas after change of gas but no accuracy warranty.
(*4) In ordering, select the voltage or the currency.
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.