Mass Flow Regulator for gases

MASS-VIEW

» Fluids : Air, N2, O2, H2, He, Ar, and CO2
» Flow range :
1L, 2L, 3L, 5L, 10L, 15L, 20L/min
» Accuracy : F.S. ±5% (Measurement point)
» Proof pressure : 0.8 MPa for 5 L/MIN or less
                               0.5 MPa for 10 L/MIN or more
» Available scale : 10:1
» Connection [Standard] Rc 1/8

[Option] Rc1/4