» MFC type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : 2 sec. or less (0~100% within ±2% typical)
» Accuracy : ±1.0% F.S. (25°C)
» Repeatability : ±0.5%F.S.
» Flow rate signals [Input/Output] 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard
» MFC type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : 1 sec. or less (0~100% within ±2% typical)
» Accuracy : ±1% F.S. (Accuracy guaranteed at 15–35°C)
» Repeatability : ±0.2%F.S.
» Flow rate signals [Input/Output] 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard
» MFC type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : 1 sec. or less (0~100% within ±2% typical)
» Accuracy : ±1.0% F.S. (20°C)
» Repeatability : Within ±0.2% F.S. (20°C)
» Flow rate signals [Input/Output] 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard
» MFC type : Analog
» Range : 1SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : 1 sec. or less (0~100% within ±2% typical)
» Accuracy : ±1% F.S. (Accuracy guaranteed at 15~35°C)
» Repeatability : ±0.2%F.S.
» Flow rate signals [Input/Output] 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard
» MFC type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : Within 2 seconds (within +/-2% F.S.)
» Accuracy : ±1.0% F.S. (25°C)
» Repeatability : ±0.5% F.S.
» Flow rate signals [Input/Output] 0-5VDC or 4-20mA
» Electric connection : D-sub half-pitch 20-pin (model HIROSEDX 10M-20S)
» MFC type : Digital
» Range : 10SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2 etc.
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : ≤ 1sec （within ± 2%F.S.）
» Accuracy : ±1.0%S.P. (25%F.S.~100%F.S.) , ±0.25%F.S. (~25%F.S.)
» Repeatability : ±0.2% F.S.
» Flow rate signals [Setting/Output] 0-5VDC or 4-20mA
» Electric connection : D-sub 9pin KFC Standard (SEMI standard compliant)
» Digital communication : RS485 rotary-switch address setting
» MFC type : Digital
» Range : 10SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : Total flow rate control range ±1 sec (within ±2% F.S.)
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.2% F.S.
» Flow rate signals [Setting/Output] 0-5VDC or 4-20mA
» Electric connection : D-sub 9pin KFC Standard (SEMI standard)
» Digital communication : RS485
» MFC type : Digital
» Range : 50SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2 etc.
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : 0~100% F.S. or more within 2 sec.
0~below 10% F.S. within 4 sec
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.75% F.S.
» Flow rate signals [Setting/Output] Digital or 0~5V, 4-20mA
» Digital communication : RS485
» MFC type : Digital
» Range : 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : Total flow rate control range ±1 sec (within ±2% F.S.)
» Accuracy : ±1.0% S.P. (> 35% F.S.)
>±0.35% F.S. (≤ 35% F.S.)
» Repeatability : ±0.25% F.S.
» Flow rate signals [Setting/Output] 0~5V DC
» Digital communication : RS485 rotary switch (up to 99 devices)
» MFC type : Digital
» Range : 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : Total flow rate control range ±1 sec (within ±2% F.S.)
» Accuracy : ±1.0% S.P. (> 35% F.S.)
±0.35% F.S. (≤ 35% F.S.)
» Repeatability : ±0.25% F.S.
» Flow rate signals [Setting/Output] 0~5V DC
» Digital communication : RS485 rotary switch (up to 99 devices)
» MFC type : Digital
» Range : 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : Total flow rate control range ±1 sec (within ±2% F.S.)
» Accuracy : ±1.0% S.P. (> 35% F.S.)
±0.35% F.S. (≤ 35% F.S.)
» Repeatability : ±0.25% F.S.
» Flow rate signals [Setting/Output] 0~5V DC or 4~20mA
» Digital communication : RS485 rotary switch (up to 99 devices)