» MFM type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Accuracy : ±1.0% F.S. (20°C)
» Repeatability : Within ±0.2% F.S. (20°C)
» Output signal : 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard
» MFM type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Response : 2 sec. or less
» Accuracy : ±1.0% F.S. (25°C)
» Repeatability : ±0.5%F.S. (20℃)
» Output signal : 0–5 VDC (External load resistance: 250 kΩ or more)
» Electric connection : Dsub 9-pin connector as per KFC Standard
» MFM type : Digital
» Range : 10SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Response : ≤ 1sec （within ± 2%F.S.）
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.2% F.S.
» Output : 4-20mA, 0-5VDC
» MFM type : Digital
» Range : 10SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2 etc.
» Sensor : Thermal sensor
» Response : ≤ 1sec （within ± 2%F.S.）
» Accuracy : ±1.0%S.P. (25%F.S.~100%F.S.) , ±0.25%F.S. (~25%F.S.)
» Repeatability : ±0.2% F.S.
» Output signal : 0-5VDC or 4-20mA
» Electric connection : D-sub 9pin KFC Standard (SEMI standard compliant)
» Digital communication : RS485 rotary-switch address setting
» MFM type : Digital
» Range : 10/50/100/500 SCCM, 1/5/10/20 SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Response : 2 sec. or less
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.2% F.S.
» Analog output : 4-20mA, 0-5V, 1-5V