Standard Mass Flow Controller
3660 Series
» MFC type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : 2 sec. or less (0~100% within ±2% typical)
» Accuracy : ±1.0% F.S. (25°C)
» Repeatability : ±0.5%F.S.
» Flow rate signals [Input/Output] 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard
3660 시리즈는 소형화 및 저비용에 중점을 둔 모델로, 실험/연구실을 비롯하여 다양한 응용 분야에서 광범위하게 사용되고 있습니다.
특징
» 정전류 온도차 검출 방식의 고급 유량 센서를 장착하여 고속 응답 보장
» 안전을 위하여 normally closed valve 사용
» 솔레노이드 액츄에이터를 사용하여 높은 신뢰성 보장
» 연소 가스 제어용의 저차압 사양 (LP 옵션)
» 가스 접촉부 – 내부식성이 강한 스테인레스 스틸 사용
적용분야
» 연구/실험실
» 각종 분석기기 및 진공장치
Standard Specifications
|
Model |
3660 | 3665 |
| Flow range (N2 equivalent, 20°C/1 atm) | 10 SCCM–20 SLM (freely selectable) |
30 SLM–100 SLM (freely selectable) |
|
Sensor |
Thermal mass flow sensor | |
| Valve type |
Proportional solenoid valve (closed when not energized) |
|
|
Control range |
2–100% (F.S.) | 5–100% (F.S.) |
| Response | 2 sec. or less (0–100% within ±2% typical) |
3 sec. or less (0–100% within ±2% typical) |
|
Accuracy |
±1.0% F.S. (25°C) | ±1.5% F.S. (25°C) |
|
Temperature coefficient |
±0.1 F.S./°C (15–35°C) |
±0.2 F.S./°C (15–35°C) |
| Repeatability |
±0.5%F.S. |
|
|
Operating differential pressure |
F.S. ≤ 5 SLM: 50–300 kPa (G) | F.S. ≤ 50 SLM: 150–300 kPa (G) |
| F.S. > 100 SLM: 50–300 kPa (G) |
F.S. > 50 SLM: 200–300 kPa (G) |
|
|
Option: Medium differential pressure (MP) and low differential pressure (LP) specifications are available. |
||
|
Allowable operating pressure |
500 kPa (G) or less |
|
|
Proof pressure |
980 kPa (G) | |
| Leak rate |
1 × 10-8 Pa·m3 /s or less (excluding permeation of He) |
|
|
Allowable ambient temperature |
5–45°C | |
|
Allowable ambient humidity |
10–90% (No condensation allowed) |
|
| Materials of parts in contact with gases |
Body: SUS316 |
|
|
Valve seat: FKM (option: CR or NBR) |
||
|
Sealing: FKM (option: CR or NBR) |
||
|
Electric connection |
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) | |
| Flow rate input signals |
0–5 VDC (Input impedance: 1 MΩ or more) |
|
|
Flow rate output signals |
0–5 VDC (External load resistance: 250 kΩ or more) | |
| Required power supply |
+15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA |
|
|
Joint (Main unit bore) |
Standard: 1/4SWL Option: 1/8SWL 1/4VCR RC1/4, etc. |
Standard: 3/8SWL Option: 1/2SWL 3/8VCR RC3/8, etc. |
|
Weight |
Approx. 1000 g |
Approx. 1500 g |
Dimensions 
카달로그 – KOFLOC 3660_Catalogue (EN)
매뉴얼 – KOFLOC 3660_Manual (EN)