Low-cost Metal Sealed Mass Flow Controller
5400 Series
» MFC type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : 1 sec. or less (0~100% within ±2% typical)
» Accuracy : ±1.0% F.S. (20°C)
» Repeatability : Within ±0.2% F.S. (20°C)
» Flow rate signals [Input/Output] 0–5 VDC
» Electric connection : Dsub 9-pin connector as per KFC Standard
5400 시리즈는 3440의 후속 모델로, 센서 구동 시스템이 개선되었습니다. 제로 드리프트가 더욱 줄어들고 더 낮은 범위의 응답이 향상됩니다.
특징
» 각 설정 범위의 제어 및 응답 향상
» 설정 전압에 대한 기능 향상 (ramping 사양 지원)
» 온도 추종형 전류차 검출 방식의 유량센서를 탑재하여 높은 정확도 및 빠른 응답 실현
» Conversion factor 교환 기능 – 멀티 가스 대응
적용분야
» 연구/실험실
» 각종 분석기기
Standard Specifications
|
Model |
5400 | ||
| Flow range (N2 equivalent, 20°C/1 atm) |
10 SCCM–20 SLM (freely selectable) |
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|
Sensor |
Thermal mass flow sensor | ||
| Valve type |
Proportional solenoid valve |
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| Control range |
2–100% (F.S.) |
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|
Response |
1 sec. or less (0–100% within ±2% typical) | ||
| Accuracy |
±1% F.S. (20°C) |
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|
Repeatability |
Within ±0.2% F.S. (20°C) | ||
| Operating differential pressure |
F.S. ≤ 5 SLM: 50–300 kPa |
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F.S.> 5 SLM: 100–300 kPa |
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Allowable operating pressure |
300 kPa (G) or less | ||
|
Proof pressure |
980 kPa (G) |
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| Leak rate |
1 × 10-11 Pa·m3 /s or less |
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|
Allowable ambient temperature |
0–50°C (Accuracy guaranteed at 15–35°C, ±0.1% F.S./°C) | ||
| Allowable ambient humidity |
10–90% (No condensation allowed) |
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|
Materials of parts in contact |
Body: SUS316L | ||
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Diaphragm: Ni-Co |
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Valve seat: PTFE |
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Sealing: SUS316L, Ni |
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| Electric connection |
Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard) |
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|
Flow rate input signals |
0–5 VDC (Input impedance: 1 MΩ or more) | ||
| Flow rate output signals |
0–5 VDC |
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|
Required power supply |
+15 VDC (±5%) 100 mA, −15VDC (±5%) 200mA |
+15 VDC (±5%) 100 mA, −15VDC (±5%) 100mA |
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|
Joint (Main unit bore) |
Standard: 1/4 VCR equivalent Option: 1/4 SWL | ||
| Weight | Approx. 1000 g |
Approx. 800 g |
|
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.