Gas Mass Flow Meter with Digital Display
820 Series
» MFM type : Analog
» Range : 0~10 sccm ~ 0~50 slpm
» Accuracy : ±1.5% of Full Scale
» Repeatability : ±0.5% of full scale
» Pressure : max. 10barg
» Size : 1/8″~1/4″
» Connections : Compression, NPT
» Output : 4~20mA, 0-5VDC
Sierra TopTrak은 0~10 sccm, 0~50 slpm까지의 유량범위에서 사용 가능하며, 모든 클린가스 유량 측정 어플리케이션에 적합합니다.
디스플레이 장착 모델은 화면을 180도 이상 기울여 쉽게 볼 수 있으며, 원격 패널 장착시 제거도 가능합니다.
특징
» 디스플레이 장착
» 온도 및 압력 보정 불필요
적용분야
» 연구/실험실
Performance Specifications
|
Accuracy |
±1.5% of Full Scale under calibration conditions including linearity over 15° to 25°C and 5 to 60 psia (0.3 to 4 bara). |
|
Repeatability |
±0.5% of Full Scale |
| Temperature Coefficient |
0.08% of Full Scale per °F (0.15% of Full Scale per °C), or better |
|
Pressure Coefficient |
0.01% of Full Scale per psi (0.15% of Full Scale per bar), or better |
|
Response Time |
800 ms time constant; six seconds (typical) within ±2% of final value over 25 to 100% of Full Scale |
Operation Specifications
|
Mass Flow Rates |
0 to 10 sccm up to 0 to 50 slpm; flow ranges specified are for an equivalent flow of nitrogen at 760 mm Hg and 21°C (70°F); other ranges in other units are available (e.g., scfh or nm3/h) |
|
Gas Pressure |
150 psig (10 barg) maximum; 20 psig (1.4 barg) optimum |
| Gas & Ambient Temperature |
32 to 122°F (0 to 50°C) |
|
Leak Integrity |
1 X 10-4 atm cc/sec of helium maximum |
|
Power Requirements |
12 to 15 VDC, 15 VDC nominal, 100 mA maximum 24 VDC optional |
|
Output Signal |
Linear 0 to 5 VDC, 1000 ohms minimum load resistance Linear 4 to 20 mA, 500 ohms maximum loop resistance |
|
Display |
3.5 digit LCD (0.6 in H); removable for remote mounting |
Physical Specifications
|
Wetted Materials |
10% glass-filled Nylon® 6/6, 316 stainless steel, nickel plating, Viton® “O”-rings standard |
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.