Process Gas Mass Controller

840 Series

» MFC type : Analog
» Range : 0~500 slpm
» Accuracy : ±1% of Full Scale
» Repeatability : ±0.15% of full scale
                             ±0.5% of full scale for 840 (NPT)
» Pressure : max. 34barg
» Size : 1/8″~1/2″
» Connections : Compression, VCR, VCO, NPT
» Output : 4~20mA, 0-5VDC

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SideTrak 840 MFC는 스테인리스 스틸 316으로 제작되어, 부식성 가스를 포함한 대부분의 모든 가스 제어가 가능합니다.

특징

» 밸브 제어의 필요차압이 낮음 (최대 1bar)

적용분야

» 일반 산업

Performance Specification

Accuracy

±1% of full scale under calibration conditions including linearity over 59°F to 77°F (15°C to 25°C) and 10 to 60 psia (0.7 to 4 bara); +/- 2% of full scale including linearity under calibration conditions over 32°F to 122°F (0°C to 50°C) and 5 to 150 psia (0.3 to 10 bara); +/- 1% of full scale accuracy at a specific temperature and pressure is available with special calibration.

Repeatability

 ±0.15% of full scale
±0.5% of full scale for 840 (NPT)

Temperature Coefficient

0.08% of full scale per °F (0.15% of full scale per °C), or better
Response Time

840 (low, med). . . . . . 300 ms time constant;
2 second (typical) to within +/-2% of set point over 20 to 100% of full scale
840 (high). . . . . . . . . . 600 ms time constant;
4 seconds (typical) to within +/-2% of set point over 20 to 100% of full scale

Operation Specifications

Gases

 All clean gases; specify when ordering
Mass Flow Rates

0 to 10 sccm to 0 to 500 slpm; flow ranges specified are for an equivalent flow of nitrogen at 760 mm Hg and 21°C (70°F); other ranges in other units are available (e.g., scfh or nm3/h)

Gas Pressure

500 psig (34 barg) maximum;
30 psig (2 barg) optimum

Output Signal

Linear 0 to 5 VDC, 1000 ohms minimum load resistance
Linear 4 to 20mA, 500 ohms maximum loop resistance

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