Mass Flow Controller with Indicator
8500 Series
» MFC type : Analog
» Range : 10SCCM~20SLM
» Sensor : Thermal mass flow sensor
» Control range : 2~100% (F.S.)
» Response : Within 2 seconds (within +/-2% F.S.)
» Accuracy : ±1.0% F.S. (25°C)
» Repeatability : ±0.5% F.S.
» Flow rate signals [Input/Output] 0-5VDC or 4-20mA
» Electric connection : D-sub half-pitch 20-pin (model HIROSEDX 10M-20S)
특징
» High lift actuator로 대유량 제어 가능
» DC24V 단일 전원으로 작동 가능
» RS232C / RS485 통신 및 적산 기능 표준 장착
» 가연성 가스 유량 제어 가능
» 변형 설치 가능
» 오토 제로, 오토 클로즈 기능 탑재
적용분야
» 연구/실험실
» 각종 분석기기
Standard Specifications
|
Model |
8500MC/MM | 8550MC/MM |
| Flow range (N2 gas calibration condition at 1atm, 20°C) |
10SCCM-20SLM |
30SLM-100SLM |
|
Sensor |
Thermal mass flow sensor | |
| Valve (*1) |
Normally-closed proportional solenoid valve |
|
|
Control/measurement range (*1) |
2-100% F.S. |
5-100% F.S. |
|
Response (*1) |
Within 2 seconds (within +/-2% F.S.) |
Within 3 seconds |
|
Accuracy |
±1.0% F.S. (25°C) | ±1.5% F.S. (25°C) |
| Temperature characteristics | ±0.1% F.S./°C (15-35°C) |
±0.2% F.S./°C (15-35°C) |
|
Applicable gases (dry gas) |
N2, Air, O2, CO2, Ar, H2, He, etc. | |
| Repeatability |
±0.5% F.S. |
|
|
Operating differential pressure (*1) |
F.S.≦5SLM 50-300kPa | F.S.≦50SLM 150-300kPa |
| F.S.＞5SLM 100-300kPa | F.S.＞50SLM 200-300kPa | |
|
Option: Lowe differential pressure (LP) etc. |
||
|
Allowable operating pressure (*1) |
500kPa (G) or less | |
| Proof pressure |
980kPa (G) |
|
|
He leak rate (*2) |
1×10-8Pa・m3 /sec. or less | |
| Allowable operating temperature |
5-45°C |
|
|
Allowable operating humidity |
10-90%RH (No condensation allowed) | |
| Materials of parts in contact
with gases |
Body: SUS316, SUS316L |
|
|
Valve sheet: FKM (option: CR or NBR) |
||
|
Sealing: FKM (option: CR or NBR) |
||
|
Electrical connection |
D-sub half-pitch 20-pin (model HIROSEDX 10M-20S) | |
| Flow rate setting/ input signal (*1) |
0-5VDC or 4-20mA (Choose at the time of order) |
|
|
Flow rate output |
0-5VDC or 4-20mA (Choose at the time of order) | |
| Communication |
RS232C or RS485 (Choose at the time of order) |
|
|
Other functions |
Other functions Changeable indication of the instant flow rate and total flow rate, Alarm output, Pattern setting | |
| Power supply |
24VDC +/-10% (ripple5%), current consumption: less than 300mA |
|
|
Joint |
1/4SWL type (standard), 1/4VCR type, RC1/4 | 3/8SWL type, 3/8VCR type, RC3/8 |
| Weight | Approx. 1200g |
Approx. 1500g |
(*1) These apply to the mass flow controller
(*2) Permeation is not included. The leakage by prolonged permeation shall not exceed 1×10-6Pa/m3 /sec
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.