MFC with Indicator

D8500

» MFC type : Digital
» Range : 50SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2 etc.
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : 0~100% F.S. or more within 2 sec.
0~below 10% F.S. within 4 sec
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.75% F.S.
» Flow rate signals [Setting/Output] Digital or 0~5V, 4-20mA
» Digital communication : RS485

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D8500 시리즈는 8500 시리즈를 디지털화 한 제품이며, 디스플레이가 탑재되어 있습니다.

특징

» 오토제로 기능 탑재
» RS232C, RS485 통신 기능 표준장착
» DC24V 전원으로 동작
» 조작성 향상 – 키 버튼 추가

적용분야

» 연구/실험실

Standard Specifications

Flow range (F.S.)
(at N2 calibration conditions)

50SCCM~5SLM

Over 5SLM~20SLM

Applicable gases (dry gas)

N2, Air, O2, CO2, Ar, H2, He등

Sensor

Thermal coil sensor

Valve actuator

Proportional Solenoid Valve (N/C)

Valve type

Poppet valve *7

Control system

Control/measurement range

2~100% F.S.

Response

0~100% F.S. or more within 2 sec. *1
0~below 10% F.S. within 4 sec. *1

Accuracy

Flow accuracy

±1.0% F.S. *2

±1.5% F.S. *2

Repeatability

±0.75%F.S

Pressure

Proof pressure

1000kPa(G)

Allowable operating pressure

500kPa(G) or less

Operating differential pressure *7

50~300kPa(G)

100~300kPa(G)

Temperature

Allowable operating temperature

5~45℃

Temperature characteristics

0.2% F.S./ ℃

Humidity

Allowable operating humidity

10~90% (No condensation allowed)

Leak

He Leak rate

1×10-8Pa・m3/sec or less *3

Flow setting method

Digital

(1)   Setting & display unit
(2)   Communications
(3)   Event input selection

Analog *7

(1) 0–5 V (2) 4–20 mA
(freely selectable)

Flow rate output

Analog

(1) 0–5 V
(2) 4–20 mA
(interlocked with the above)

Display

Display format

7-segment 4-digit LED

Total flow

12 digits *4

Mounting direction

Changeable

Built-in/Separate

Built-in,
separate 1m,
separate 3m,
separate 5m

Status display LED

OK (within allowable range),
ALM (alarm output interlock)
OUT1 (event output 1 interlock),
OUT2 (event output 2 interlock)
SV (set flow),
PV (instantaneous flow),
TF (total flow),
IF (mode setting)

Other I/O
functions

Event input

3 × contact input

Alarm output

1 × open collector output, Max. 35 V, 50 mA

Event output

2 × open collector output Max. 35 V, 50 mA

Communications

RS-485, half-duplex, 9600 bps

Power supply

Rating

24 VDC,
current consumption: 300 mA max.

Allowable supply voltage range

21.6~26.4 VDC
(Ripple: 5% or less)

Mounting position

Not specified

Applicable standards

RoHS and EN62326-1: 2006

Materials of parts in contact
with gases

SUS316, SUS316L, SUS430, FKM, PTFE, chloroprene
rubber (option)

Weight

Built-in: Approx. 1000g
Separate (excluding the cable): Approx. 1200 g *6

(*1) Time required to reach the control flow ±2% F.S. from the fully closed state        
(*2) With the standard pressure of 200 kPa (G) and the standard temperature of 20℃  
(*3) Permeation is not included. The leakage by prolonged permeation shall not exceed 1 × 10-6 Pa・m3/sec.     
(*4) The units of measurement vary with the full scale flow. E.g.: With 1 SLM, the flows can be added up to 9999 9999 9.999 L.
(*5) For other joints, please contact us. (*6) The weight may slightly vary depending on the joint. (*7) These apply to the D8500MC mass flow controller.

Dimensions

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  카달로그 – KOFLOC D8500_Catalogue (EN)