Digital Mass Flow Controller
DF-250C
» MFC type : Digital
» Range : 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : Total flow rate control range ±1 sec (within ±2% F.S.)
» Accuracy : ±1.0% S.P. (> 35% F.S.)
±0.35% F.S. (≤ 35% F.S.)
» Repeatability : ±0.25% F.S.
» Flow rate signals [Setting/Output] 0~5V DC
» Digital communication : RS485 rotary switch (up to 99 devices)
DF-250시리즈는 50SLM 미만의 사양에서 1초 이내의 응답성을 실현한 고성능 디지털 MFC입니다.
이 시리즈는 최대 300SLM까지의 라인업을 갖추었습니다.
특징
» 표준 가스로 실제 가스 교정
» ~50SLM 사양의 모델은 1초 이내 응답성
» RS485 통신 기능
» RoHS / CE 준수
적용분야
» 연구/실험실
Standard Specifications
|
Model |
DF-250C | |||||||
| Sensor type |
Thermal sensor |
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|
Valve type |
Normally closed proportional solenoid valve | |||||||
| Applicable gases*1 | N2, Air, H2, He, Ar, O2, CO2, etc. (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) |
Air, N2 |
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|
Flow range*2 |
10 SCCM to 10 SLM |
20 to 50 SLM (20 to 30 SLM for CO2) |
100, 150 SLM |
200, 300 SLM |
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|
Control range |
2 to 100% (F.S.) |
5 to 100% (F.S.) |
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|
Response*3 |
Total flow rate control range ≤ 1 sec (within ±2% F.S.) | ≤1.5 sec / ≤ 3 sec less than 10% (within ±2% F.S.) |
≤2 sec (within ±2% F.S.) |
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|
Accuracy*4 |
±1.0% F.S. | ±2.0% F.S | ||||||
| Repeatability | ±0.25%F.S. |
±0.5%F.S. |
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|
Operating differential |
50 to 300 kPa (100 to 300 kPa for Ar and CO2) |
100 to 300 kPa (150 to 300 kPa for Ar and CO2) |
150 to 350 kPa |
200 SLM : 200 to 350 kPa |
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|
Inlet maximum pressure |
500kPa（G） | |||||||
| Proof pressure |
980kPa（G） |
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|
External leak rate |
≤1.0 x 10-8 Pa·m3/sec (He) |
≤1.0 x 10-7 Pa·m3/sec (He) |
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Temperature |
Working temp. |
5〜50℃ |
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|
Accuracy |
15〜35℃ |
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|
Allowable |
-10〜60℃ |
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Allowable operating humidity |
10 to 90% RH (without dew condensation) |
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|
Materials of gas contact part |
SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM |
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|
Electrical connection |
D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks X 2 |
D-sub 9-pin, HR-10A (two) |
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|
Flow rate setting signal |
0 to 5 V DC (input impedance: approx. 1 MΩ) | |||||||
| Flow rate output signal |
0 to 5 V DC (load resistance 10 kΩ) |
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|
Digital communication |
Address setting with RS485 rotary switch : up to 99 devices (9600 bps) | |||||||
| Required power supply (DC) | ＋15V±5%：150mA -15V±5%：150mA |
+15 V DC (±5%) : 150 mA |
24 V DC (±10%) : 450mA |
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|
Joint*6 |
1/4 F900 (standard), 1/4 UJR, Rc 1/4 |
1/2 SW (standard), 3/4 SW |
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Mounting posture |
Horizontal installation recommended. | |||||||
| Weight*7 | Approx. 850g | Approx. 1000g | Approx. 2250g |
Approx. 3500g |
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(*1) The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
(*2) The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
(*3) Guarantee for calibration gas: N2.
(*4) Accuracy for calibration gas: N2, flow range (max. full scale).
(*5) The operating differential pressure may differ depending on specifications.
(*6) Contact us for any other joints.
(*7) Exclusive of weight of joint.
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.