Digital Mass Flow Controller with Indicator
DF-300C
» MFC type : Digital
» Range : 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : Total flow rate control range ±1 sec (within ±2% F.S.)
» Accuracy : ±1.0% S.P. (> 35% F.S.)
±0.35% F.S. (≤ 35% F.S.)
» Repeatability : ±0.25% F.S.
» Flow rate signals [Setting/Output] 0~5V DC or 4~20mA
» Digital communication : RS485 rotary switch (up to 99 devices)
DF-250시리즈는 50SLM 미만의 사양에서 1초 이내의 응답성을 실현한 고성능 디지털 MFC입니다.
이 시리즈는 최대 300SLM까지의 라인업을 갖추었습니다.
특징
» 표준 가스로 실제 가스 교정
» ~50SLM 사양의 모델은 1초 이내 응답성
» RS485 통신 기능
» RoHS / CE 준수
적용분야
» 연구/실험실
Standard Specifications
|
Model |
DF-300C | |
| Sensor type |
Thermal sensor |
|
|
Valve type |
Normally closed proportional solenoid valve | |
| Applicable gases *1 |
N2, (Air, H2, He, Ar, O2, CO2) *2 |
|
|
Flow range *3 |
10/30/50/100/300/500 SCCM, 1/3/5/10 SLM *2 | |
| Control range |
2-100% (F.S.) |
|
|
Response *4 |
Total flow rate control range ±1 sec (within ±2% F.S.) |
|
|
Accuracy *5 |
±1.0% S.P. (> 35% F.S.) |
|
|
Repeatability |
±0.25%F.S. | |
| Operating differential pressure *6 |
50-300 kPa (100-300 kPa for Ar and CO2) |
|
|
Inlet maximum pressure |
500kPa（G） | |
| Proof pressure |
980kPa（G） |
|
|
External leak rate |
≤1.0 x 10-8 Pa·m3/sec (He) | |
| Temperature |
Working temp. |
5〜50℃ |
| Accuracy guaranteed temp. |
15〜35℃ |
|
|
Allowable |
-10〜60℃ |
|
|
Permissible ambient humidity |
10-90% RH (without dew condensation) |
|
|
Materials of gas contact part |
SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM |
|
|
Electrical connection |
D-sub 15-pin male, high density, HR-10A (two) | |
| Flow rate setting signal |
0-5 V DC (input impedance: approx. 1 MΩ), or 4 to 20 mA (input impedance: approx. 250 Ω) |
|
|
Flow rate output signal |
0-5 V DC (load resistance 10 kΩ), or 4 to 20 mA |
|
|
Digital communication |
Address setting with RS485 rotary switch or indicator: |
|
|
Event input |
Three contact inputs (non-insulated) | |
| Event output |
Three NPN open collectors |
|
|
Required power supply (DC) |
+24 V DC (±10%), 300 mA max. (DC jack, D-sub) |
|
|
Joint *8 |
1/4SWL type (standard), 1/4VCR type, RC1/4 | |
|
Mounting posture |
Horizontal installation recommended |
|
| Weight *9 |
Approx. 950 g |
|
(*1) The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
(*2) Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the
specified full scale.
(*3) The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
(*4) Guarantee for calibration gas: N2.
(*5) Accuracy for calibration gas: N2, flow range (max. full scale).
(*6) The operating differential pressure may differ depending on specifications.
(*7) Contact us for any other joints.
(*8) Exclusive of weight of joint.
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.