Thermal Mass Flow Contorllers for Gases
EL-FLOW Classic
» Range : lowest range 0.16…8 sccm
up to highest range 0.4…20 slm
» Accuracy : ±1% FS (based on actual calibration)
» Connections : 1/4” BSPP female thread;
optional accessories: compression type or face
seal couplings in various inch or metric sizes
» Operating pressure : 30 bar
» Settling time : 1~2 seconds
» Analog output/command : 0…5 Vdc or 4…20 mA
» Warm-up time : 30 min. for optimum accuracy
EL-Flow Classic은 디지털 기능을 뺀 아날로그 시그널을 기본으로 하는 제품입니다. 30bar(g)의 작동 압력에서 0.16~8 sccm ~ 0.4~20 slm의 가스 유량 범위를 측정하고 제어하도록 설계되었습니다.
특징
» 빠른 응답, 뛰어난 반복성
» 비용 효율적인 솔루션
» Analog I/O-signals: 0…5 Vdc or 4…20 mA (sourcing)
적용분야
» 분석 및 환경 측정
» 버너 (Burner) 제어
» 진공 기술
» 표면 처리 설비
» 식품, 제약 및 (석유) 화학 산업
Measurement / Control system
|
Flow ranges |
from 0.16…8 sccm up to 0.4…20 slm; |
|
Accuracy (incl. linearity) |
±1% FS (based on actual calibration) |
| Turndown |
1 : 50 |
|
Repeatability |
< 0.2% Rd |
| Settling time |
1…2 seconds |
|
Operating pressure |
0…30 bar(g) |
| Operating temperature |
0…50°C |
|
Temperature sensitivity |
zero: < 0.1% FS/°C; span: < 0.1% Rd/°C |
| Warm-up time |
30 min. for optimum accuracy |
|
Leak integrity, outboard |
< 2 x 10-9 mbar l/s He |
| Control valve |
normally closed solenoid valve |
Mechanical parts
|
Material (wetted parts) |
stainless steel 316L or comparable |
| Seals |
Viton® |
|
Process connections |
1/4” BSPP female thread; |
Electrical properties
|
Power supply |
+15…24 Vdc |
| Power consumption |
max. 320 mA |
|
Analog output/command |
0…5 Vdc or 4…20 mA (sourcing output) |
| Electrical connection (power + I/O signals) |
9-pin D-connector (male) |
|
CE |
EMC 2004/108/EC |
|
Ingress protection (housing) |
IP40 |
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.