Compact and high grade digital MFC
EX-250S Series
» MFC type : Digital
» Range : 10SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Control range : 2~100% (F.S.)
» Response : Total flow rate control range ±1 sec (within ±2% F.S.)
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.2% F.S.
» Flow rate signals [Setting/Output] 0-5VDC or 4-20mA
» Electric connection : D-sub 9pin KFC Standard (SEMI standard)
» Digital communication : RS485
EX-250S 시리즈는 컴팩트한 디자인으로 기존의 아날로그 MFC인 3660보다 응답성 및 재현성이 더 업그레이드 된 제품입니다.
(응답성 1초 이내, 재현성 ±2% 이내)
특징
» 높은 정확도 및 안정성, 빠른 반응
» Rotary Switch 전환으로 본체에 등록되어 있는 가스 종류 사용 가능
» RoHS 및 CE 인증품
적용분야
» 연구/실험실
» 각종 분석기기
Standard Specifications
|
Sensor type |
Thermal sensor | |
| Valve type |
Normally closed proportional solenoid valve |
|
|
Applicable gases（*1） |
N2、Air、H2、He、Ar、O2、CO2 etc. | |
|
(Gases not specifically mentioned here are subject to calibration for N2 equivalent.) |
||
|
Flow range（*2） |
10SCCM~5SLM | |
| Control（measure）range |
2~100%(F.S.) |
|
|
Response |
≤ 1sec (within ± 2%F.S.) (*8) L:50kPa-149kPa H:150kPa-300kPa |
|
| Accuracy（*3） |
± 1.0%F.S. |
|
|
Repeatability |
± 0.2%F.S. | |
| Operating differential pressure（*4） |
50~300kPa（Ar, CO2 : 100kPa~300kPa） |
|
|
Inlet maximum pressure |
500kPa (G) | |
| Proof pressure |
980kPa (G) |
|
|
External leak rate (He) |
≤1.0 × 10-8Pa・m3/sec | |
| Temperature |
Working temp. |
5~50℃ |
|
Accuracy guaranteed temp. |
15~35℃ |
|
|
Allowable storage temp. |
-10~60℃ |
|
|
Allowable operating humidity |
10~90%RH (without dew condensation) | |
| Materials of gas contact part |
SUS316, SUS316L, magnetic stainless steel(*5), PTFE, FKM |
|
|
Electrical connection |
Dsub 9pin KFC Standard (SEMI standard compliant) | |
|
HR-10A |
||
|
Flow rate setting signal |
0~5VDC(input impedance: approx. 1M Ω) |
|
|
Flow rate output signal |
0~5VDC( load resistance ≧10k Ω) |
|
|
or 4~20mA( load resistance ≧500 Ω) |
||
|
Digital communication |
RS485 rotary-switch address setting |
|
|
Required power supply (DC) |
+15VDC( ± 5%)100mA , -15VDC（± 5%）150mA | |
|
or +24VDC（± 10%) ≤180mA (MFM would be ≤100mA) |
||
|
Joint（*6） |
1/4F900（standard） | |
| Mounting posture |
Horizontal installation recommended. |
|
|
Weight（*7） |
Approx.500g |
|
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.