Compact Digital MFM
EX-250SM
» MFM type : Digital
» Range : 10SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2
» Sensor : Thermal sensor
» Response : ≤ 1sec （within ± 2%F.S.）
» Accuracy : ±1.0% F.S.
» Repeatability : ±0.2% F.S.
» Output : 4-20mA, 0-5VDC
EX-250SM은 소형임에도 불구하고 RS 485 통신으로 높은 정확도와 빠른 응답을 실현합니다.
특징
» 높은 정확도 및 안정성, 빠른 반응
» Rotary Switch 전환으로 본체에 등록되어 있는 가스 종류 사용 가능
(N2, Air, H2, He, Ar, O2, CO2)
» RoHS 및 CE 인증품
적용분야
» 연구/실험실
Standard Specifications
|
Sensor type |
Thermal sensor |
|
Applicable gases *1 |
N2, Air, H2, He, Ar, O2, CO2 |
| Flow range *2 |
10SCCM-5SLM |
|
Control range |
2-100% (F.S.) |
| Response |
Total flow rate control range ±1 sec (within ±2% F.S.) |
|
Accuracy *3 |
±1.0%F.S. |
| Repeatability |
±0.2%F.S. |
|
Inlet maximum pressure |
500kPa (G) |
| Proof pressure |
980kPa (G) |
|
External leak rate *5 |
≦ 1×10-8Pa·m3/sec |
| Working temp. |
5-50°C |
|
Accuracy guaranteed temp. |
15-35°C |
|
Allowable storage temp. |
-10-60°C |
| Allowable operating humidity |
10-90% RH (without dew condensation) |
| Materials of gas contact part |
SUS316, SUS316L, Magnetic stainless steel (*6), PTFE, FKM |
|
Electrical connection |
Dsub9 pin KFC Standard (SEMI standard) HR-10A |
| Flow rate output signal |
0-5VDC or 4-20mA |
|
Digital communication |
RS485 |
| Required power supply (DC) |
+15VDC (+/-5%) less than 100mA, -15VDC (+/-5%) less than 150mA Or +24VDC (+/-10%) less than 180mA (MFM: less than 100mA) |
|
Joint *7 |
1/4SWL type (standard) |
| Mounting posture |
Horizontal installation recommended |
|
Weight *8 |
Approx. 440g |
(*1) Dry gas and clean gas not included the corrosive particles and dust/mist.
(*2) SCCM: cc/min at 0°C, 1atm SLM: L/min at 0°C, 1atm
(*3) Accuracy of the full scale flow rate
(*5) Permeation is not included. The leakage by prolonged permeation shall not exceed 1×10-6Pa/m3/sec
(*6) No use of the magnetic stainless steel
(*7) Contact us about the connection.
(*8) Weight without the connections
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.