Sensor type

Thermal sensor

Valve type

Normally closed proportional solenoid valve

Applicable gases（*1）

N₂, Air, H₂, He, Ar, O₂, CO₂ etc.

(Gases not specifically mentioned here are subject to calibration for N₂ equivalent.)

Flow range（*2）

10SCCM~5SLM

Control（measure）range

2~100% (F.S.)

Response

≤ 1sec （within ±2% F.S.）

Accuracy

±1.0%S.P. (25%F.S.~100%F.S.), ±0.25%F.S. (～25%F.S.)

Repeatability

±0.2% F.S.

Operating differential pressure（*3）

50~300kPa（Ar, CO₂：100kPa～300kPa）

Inlet maximum pressure

300kPa (G)

Proof pressure

980kPa (G)

External leak rate（He）

≤ 1.0 × 10^-11Pa・m³/sec

Temperature

Working temp.

5~50℃

Accuracy guaranteed temp.

15~35℃

Allowable storage temp.

-10~60℃

Allowable operating humidity

10~90%RH (without dew condensation)

Materials of gas contact part

SUS316L, PTFE, Ni-Co

Electrical connection

Dsub 9pin KFC Standard（SEMI standard compliant）

HR-10A X 2

Flow rate setting signal

0~5VDC(input impedance: approx. 1MΩ)

or 4~20mA(input impedance: approx. 250Ω)

Flow rate output signal

0~5VDC( load resistance ≧10k Ω)

or 4~20mA( load resistance ≧500 Ω)

Digital communication

RS485　rotary-switch address setting

Required power supply (DC)

+15VDC (±5%) 100Ma, -15VDC (±5%) 150mA

or +24VDC（±10%）≤180mA　 (MFM would be≤100mA)

Joint

1/4 VCR

Mounting posture

Free

Weight

Approx. 800g