All metal digital MFM
EX-550M
» MFM type : Digital
» Range : 10SCCM~5SLM
» Applicable gases : N2, Air, H2, He, Ar, O2, CO2 etc.
» Sensor : Thermal sensor
» Response : ≤ 1sec （within ± 2%F.S.）
» Accuracy : ±1.0%S.P. (25%F.S.~100%F.S.) , ±0.25%F.S. (~25%F.S.)
» Repeatability : ±0.2% F.S.
» Output signal : 0-5VDC or 4-20mA
» Electric connection : D-sub 9pin KFC Standard (SEMI standard compliant)
» Digital communication : RS485 rotary-switch address setting
EX-550M 시리즈는 Metal seal 구조로 고정도 계측이 가능한 제품입니다.
특징
» 빠른 응답, 제로점 안정성
» 0~5VDC 또는 4~20mA 입력/출력 신호 및 ±15VDC 또는 24VDC 전원 공급 장치
» Rotary Switch 전환으로 본체에 등록되어 있는 가스 종류 사용 가능
» RoHS 및 CE 인증품
적용분야
» 연구/실험실
» 각종 분석기기
Standard Specifications
|
Sensor type |
Thermal sensor |
| Applicable gases *1 |
N2, Air, H2, He, Ar, O2, CO2 |
|
Flow range *2 |
10SCCM-5SLM |
| Control range |
2-100% (F.S.) |
|
Response |
Total flow rate control range ±1 sec (within ±2% F.S.) |
| Accuracy |
±1.0%S.P. (25%F.S.-100%F.S.) , ±0.25%F.S. (-25%F.S.) |
|
Repeatability |
±0.2%FS |
| Inlet maximum pressure |
350kPa (G) |
|
Proof pressure |
980kPa (G) |
| External leak rate |
≦ 1×10-11Pa·m3 /sec |
|
Working temp. |
5-50°C |
| Accuracy guaranteed temp. |
15-35°C |
|
Allowable storage temp. |
-10-60°C |
| Allowable operating humidity |
10-90% RH (without dew condensation) |
|
Materials of gas contact part |
SUS316L, Magnetic stainless steel, PTFE, Ni-Co |
| Electrical connection |
Dsub9 pin KFC Standard（SEMI standard) |
|
Flow rate output signal |
0-5VDC or 4-20mA |
| Digital communication |
RS485 |
|
Required power supply (DC) |
+15VDC (+/-5%) less than 100mA, -15VDC (+/-5%) less than 150mA |
|
Joint |
1/4VCR type (standard) |
|
Mounting posture |
Not specified |
| Weight |
Approx. 550g |
(*1) Dry gas and clean gas not included the corrosive particles and dust/mist.
(*2) SCCM: cc/min at 0°C, 1atm SLM: L/min at 0°C, 1atm
Dimensions
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.