EX-Proof Mass Flow Controllers for gases

EX-FLOW

» Range : lowest range 0.16…8ml/min
                  up to highest range 7.5…375m3/h
» Accuracy : ±1% of rate
» Connections : compression type or face seal couplings
                            wafer type on series F-106
                            DIN or ANSI flanges on series F-107
» Operating pressure : max. 400 bar
» Output signal : 15…20mA