Portable Mass Flow Meter

mfm

MB Series

» Range : lowest range 0-0.5 sccm/0-500 sμlm
                  up to highest range 0-5000 slpm

» Standard Accuracy : ±0.6%

» Optional High-Accuracy : ±0.5%

» Typical Response Time : 5~10ms

» Repeatability : 0.1% of reading +0.02% of full scale

» Operating temperature : -10°C to +60°C

» Max internal pressure (static) : 145 psig

» Warm-up Time : < 1 Second