Mass Flow Controller for SEMI apps
MCE Series
» Range : lowest range 0-0.5 sccm/0-500 sμlm
up to highest range 0-20 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 100 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 145 psig
» Warm-up Time : < 1 Second
진공 가스 MFC
특징
» 30ms 제어 응답 » 빠른 속도 및 안정성을 위한 접근 가능한 PID valve tuning » full-range의 안정성을 위한 맞춤형 밸브 오리피스 사이즈
동영상
Performance
|
|
MCE | MCES |
| Accuracy at calibration conditions after tare |
± (0.8% of Reading + 0.2% of Full Scale) |
|
|
High Accuracy at calibration conditions after tare |
± (0.4% of Reading + 0.2% of Full Scale) High Accuracy option not available for units ranged under 5 sccm or over 500 slpm. |
|
|
Repeatability |
± 0.2% Full Scale | |
| Zero Shift and Span Shift |
0.02% Full Scale / ºCelsius / Atm |
|
|
Operating Range / Turndown Ratio |
0.5% to 100% Full Scale / 200:1 Turndown | 1% to 100% Full Scale / 100:1 Turndown |
| Maximum Controllable Flow Rate |
102.4% Full Scale |
|
|
Maximum Measurable Flow Rate |
up to 128% Full Scale (Gas Dependent) | |
| Typical Response Time |
100 ms (Adjustable) |
|
|
Warm-up Time |
< 1 Second |
|
Operating Conditions
|
|
MCE | MCES |
| Mass Reference Conditions (STP) |
25ºC & 14.696 psia (standard — others available on request) |
|
|
Operating Temperature |
−10 to +60 ºCelsius | |
| Humidity Range (Non–Condensing) |
0 to 100% |
|
|
Maximum Internal Pressure (Static) |
145 psig | |
|
Proof Pressure |
175 psig |
|
| Mounting Attitude Sensitivity |
None |
|
|
Valve Type |
Normally Closed | |
| Ingress Protection |
IP40 |
|
|
Wetted Materials |
MCE: 303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR Stainless Steel, Silicon, Glass. MCES: 316LSS, 303SS, 430FRSS, FFKM (Kalrez) standard, Viton, EPDM, Buna, Neoprene as needed for some gases. If your application demands a different material, please contact Alicat. |
|
Communications/Power
|
|
MCE | MCES |
| Monochrome LCD or Color TFT Display with integrated touchpad |
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature |
|
|
Digital Input / Output Signal1 Options |
RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT |
|
|
Analog Input / Output Signal2 Options |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA |
|
|
Optional Secondary Analog Output Signal2 |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA | |
| Electrical Connection Options |
8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6-pin locking / 8-pin M12 |
|
|
Supply Voltage |
12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) | |
| Supply Current |
0.300 Amp |
|
| 1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature 2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow, Volumetric Flow, Pressure or Temperature | ||
* 더 자세한 사양은 카달로그를 참고해주시기 바랍니다.