High Pressure Gas MFC
MCQ Series
» Range : lowest range 0-10 sccm
up to highest range 0-5000 slpm
» Accuracy : ±2% Full Scale
» Typical Response Time : 100 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 320 psig
» Warm-up Time : < 1 Second
고압 어플리케이션을 위한 Mass Flow Controller
이 컨트롤러는 압력이 급상승할 때에도 새로운 설정치를 빠르게 달성하고 유지합니다.
동영상
Performance
|
Available Ranges |
10 sccm to 3000 slpm |
| Accuracy at calibration conditions after tare |
±2% Full Scale |
|
Repeatability |
±0.2% Full Scale |
| Zero Shift and Span Shift |
0.02% Full Scale / ºCelsius / Atm |
|
Operating Range / Turndown Ratio |
2% to 100% Full Scale / 50:1 Turndown |
| Maximum Flow Rate |
up to 128% Full Scale (Gas Dependent) |
|
Typical Response Time |
100 ms (Adjustable) |
| Warm-up Time |
< 1 Second |
Operating Conditions
|
Operating Temperature |
−10 to +60 ºCelsius |
|
Maximum Internal Pressure |
320 psig |
| Proof Pressure |
400 psig |
|
Mounting Attitude Sensitivity |
None |
| Ingress Protection |
IP40 |
|
Wetted Materials |
303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR Stainless Steel, Silicon, Glass. |
Communications/Power
|
Monochrome LCD or Color TFT Display |
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature |
| Digital Output Signal1 Options |
RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT |
|
Analog Output Signal2 Options |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA |
| Optional Secondary Analog Output Signal2 |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA |
|
Electrical Connection Options |
8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6-pin locking / 8-pin M12 |
| Supply Voltage |
12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) |
|
Supply Current |
0.250 Amp |
- The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature
- The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow, Volumetric Flow,
Pressure or Temperature
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