Vacuum Gas Mass Flow Controller
MCV Series
» Range : lowest range 0-0.5 sccm / 0-500 sμlm
up to highest range 0-20 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 100 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 145 psig
» Warm-up Time : < 1 Second
진공 가스 MFC
MCV 시리즈는 MCE와 하드 진공 어플리케이션을 위한 통합 공압 차단 밸브를 결합시킵니다.
영점 설정 조건에서 오염을 방지하기 위해 공기 라인을 차단 밸브에 연결하십시오.
동영상
Performance
|
Model |
MCV |
MCVS |
|
Accuracy at calibration conditions after tare |
± (0.8% of Reading + 0.2% of Full Scale) |
|
|
High Accuracy at calibration conditions after tare |
± (0.4% of Reading + 0.2% of Full Scale) High Accuracy option not available for units ranged under 5 sccm |
|
|
Repeatability |
± 0.2% Full Scale |
|
|
Zero Shift and Span Shift |
0.02% Full Scale / ºCelsius / Atm |
|
|
Operating Range / Turndown Ratio |
0.5% to 100% Full Scale / 200:1 Turndown |
1% to 100% Full Scale / 100:1 Turndown |
|
Maximum Controllable Flow Rate |
102.4% Full Scale |
|
|
Maximum Measurable Flow Rate |
up to 128% Full Scale (Gas Dependent) |
|
|
Typical Response Time |
100 ms (Adjustable) |
|
|
Warm-up Time |
< 1 Second |
|
|
Integrated Valve Leak Integrity |
1 x 10-9 atm scc/sec Helium max |
|
Operating Conditions
|
Model |
MCV |
MCVS |
|
Mass Reference Conditions (STP) |
25ºC & 14.696 psia (standard — others available on request) |
|
|
Operating Temperature |
−10 to +60 ºCelsius |
|
|
Humidity Range (Non–Condensing) |
0 to 100% |
|
|
Maximum Internal Pressure (Static) |
145 psig |
|
|
Proof Pressure |
175 psig |
|
|
Mounting Attitude Sensitivity |
None |
|
|
Valve Type |
Normally Closed |
|
|
Ingress Protection |
IP40 |
|
|
Wetted Materials |
MCV: 303 & 302 Stainless Steel, Viton®, Heat Cured Silicone Rubber, Glass Reinforced Polyphenylene Sulfide, Heat Cured Epoxy, Aluminum, Gold, Brass, 430FR Stainless Steel, Silicon, Glass, PCTFE. |
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Communications/Power
|
Model |
MCV |
MCVS |
|
Monochrome LCD or Color TFT Display with integrated touchpad |
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature |
|
|
Digital Input / Output Signal1 Options |
RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT |
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Analog Input / Output Signal2 Options |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA |
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Optional Secondary Output Signal2 |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA |
|
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Electrical Connection Options |
8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6-pin locking / 8-pin M12 |
|
|
Supply Voltage |
12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) |
|
|
Supply Current |
0.250 Amp |
|
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1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature |
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