Anti-Corrosive Mass Flow Meter
MS Series
» Range : lowest range 0-0.5 sccm/0-500 sμlm
up to highest range 0-5000 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 10 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 145 psig
» Warm-up Time : < 1 Second
높은 정확도, 실시간 다변량 유량 측정
특징
» 내구성이 강한 SUS316L으로 제작되어 부식에 강함
» 빠른 응답속도 (<10ms)
» Warm-up 타임 불필요, 1초 내에 측정 준비 가능
» 컴퓨터 또는 PLC와 함께 사용 가능 (컴퓨터 또는 PLC 없이 단독 유닛으로도 사용 가능)
» 모든 유량 데이터를 하나의 스크린에서 확인 가능 (Flow, Pressure, Temperature)
» 디지털 및 아날로그 출력
동영상
Performance
|
Accuracy at calibration conditions after tare |
± (0.8% of Reading + 0.2% of Full Scale) |
| High Accuracy at calibration conditions after tare |
± (0.4% of Reading + 0.2% of Full Scale) |
|
Accuracy for Bidirectional Meters |
± (0.8% of reading + 0.2% of total span from positive full scale to negative full scale) |
|
Repeatability |
± 0.2% Full Scale |
| Zero Shift and Span Shift |
0.02% Full Scale / ºCelsius / Atm |
|
Operating Range / Turndown Ratio |
1% to 100% Full Scale / 100:1 Turndown |
| Maximum Measurable Flow Rate |
up to 128% Full Scale (Gas Dependent) |
|
Typical Response Time |
10 ms (Adjustable) |
| Warm-up Time |
< 1 Second |
Operating Conditions
|
Mass Reference Conditions (STP) |
25ºC & 14.696 psia (standard — others available on request) |
| Operating Temperature |
−10 to +60 ºCelsius |
|
Humidity Range (Non–Condensing) |
0 to 100% |
| Maximum Internal Pressure (Static) |
145 psig |
|
Maximum Allowable Instantaneous Differential |
75 psid |
|
Proof Pressure |
175 psig |
| Mounting Attitude Sensitivity |
None |
|
Ingress Protection |
IP40 |
| Wetted Materials |
316LSS, FFKM (Kalrez) standard; Viton, EPDM, Buna, Neoprene as needed for some gases. |
Communications/Power
|
Monochrome LCD or Color TFT Display with |
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature |
| Digital Output Signal1 Options |
RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT |
|
Analog Output Signal2 Options |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA |
| Optional Secondary Analog Output Signal2 |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA |
|
Electrical Connection Options |
8 Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6 pin locking / 8pin M12 |
|
Supply Voltage |
7 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) |
| Supply Current |
0.040 Amp (+ output current on 4-20 mA) |
1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature.
2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow, Volumetric Flow,
Pressure or Temperature.