Mass Flow Controller for aggressive gases
MCS Series
» Range : lowest range 0-0.5 sccm/0-500 sμlm
up to highest range 0-5000 slpm
» Accuracy : ± (0.8% of Reading + 0.2% of Full Scale)
» Typical Response Time : 100 ms (Adjustable)
» Repeatability : ± 0.2% Full Scale
» Operating temperature : -10°C to +60°C
» Max internal pressure (static) : 145 psig
» Warm-up Time : < 1 Second
압력 변동을 억제하는 즉각적인 가스 유량 제어
특징
» 30ms 제어 응답
» 빠른 속도 및 안정성을 위한 접근 가능한 PID valve tuning
» full-range의 안정성을 위한 맞춤형 밸브 오리피스 사이즈
동영상
Performance
|
|
MCS & MCRS Mass Flow Controller |
| Accuracy at calibration conditions after tare |
± (0.8% of Reading + 0.2% of Full Scale) |
|
High Accuracy at calibration conditions after tare |
± (0.4% of Reading + 0.2% of Full Scale) |
|
Repeatability |
± 0.2% Full Scale |
| Zero Shift and Span Shift |
0.02% Full Scale / ºCelsius / Atm |
|
Operating Range / Turndown Ratio |
1% to 100% Full Scale / 100:1 Turndown |
| Maximum Controllable Flow Rate |
102.4% Full Scale |
|
Maximum Measurable Flow Rate |
up to 128% Full Scale (Gas Dependent) |
| Typical Response Time |
100 ms (Adjustable) |
|
Warm-up Time |
< 1 Second |
Operating Conditions
|
|
MCS & MCRS Mass Flow Controller | |
| Mass Reference Conditions (STP) |
25ºC & 14.696 psia (standard — others available on request) |
|
|
Operating Temperature |
−10 to +60 ºCelsius | |
| Humidity Range (Non–Condensing) |
0 to 100% |
|
|
Maximum Internal Pressure (Static) |
145 psig | |
| Proof Pressure |
175 psig |
|
|
Mounting Attitude Sensitivity |
MCS: None | MCRS: Mount with valve cylinder vertical & upright |
| Valve Type |
Normally Closed |
|
|
Ingress Protection |
IP40 | |
| Wetted Materials |
316LSS, 303SS, 430FRSS, FFKM (Kalrez) standard, Viton, EPDM, Buna, Neoprene as needed for some gases. If your application demands a different material, please contact Alicat. |
|
Communications/Power
|
|
MCS & MCRS Mass Flow Controller | |
| Monochrome LCD or Color TFT Display with integrated touchpad |
Simultaneously displays Mass Flow, Volumetric Flow, Pressure and Temperature |
|
|
Digital Input / Output Signal1 Options |
RS-232 Serial / RS-485 Serial / Modbus RTU / PROFIBUS / EtherNet/IP / DeviceNet / Modbus TCP/IP / EtherCAT |
|
|
Analog Input / Output Signal2 Options |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA | |
| Optional Secondary Output Signal2 |
0-5 Vdc / 1-5 Vdc / 0-10 Vdc / 4-20 mA |
|
|
Electrical Connection Options |
8-Pin Mini-DIN / 9-pin D-sub (DB9) / 15-pin D-sub (DB15) / 6-pin locking / 8-pin M12 | |
| Supply Voltage |
MCS: 12 to 30 Vdc (15-30 Vdc for 4-20 mA outputs) |
MCRS / MCRHS: 24 to 30 Vdc |
|
Supply Current |
MCS: 0.250 Amp |
MCR: 0.750 Amp (MCRHS: 2.0 Amp) |
| 1. The Digital Output Signal communicates Mass Flow, Volumetric Flow, Pressure and Temperature 2. The Analog Output Signal and Optional Secondary Analog Output Signal communicate your choice of Mass Flow, Volumetric Flow, Pressure or Temperature |
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